MEMS-based Micro Coriolis mass flow sensor

J. Haneveld; Dannis Michel Brouwer; A. Mehendale; R. Zwikker; Theodorus S.J. Lammerink; Meint J. de Boer; Remco J. Wiegerink

MEMS-based Micro Coriolis mass flow sensor

J. Haneveld, Dannis Michel Brouwer, A. Mehendale, R. Zwikker, Theodorus S.J. Lammerink, Meint J. de Boer, Remco J. Wiegerink

Faculty of Engineering Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

2 Citations (Scopus)

100 Downloads (Pure)

Abstract

We have realized a micromachined micro Coriolis flow sensor consisting of a silicon nitride resonant tube of 40 μm diameter and 1.2 μm wall thickness. First measurements with both gas and liquid flows have demonstrated an unprecedented mass flow resolution in the order of 10 mg/hr at a full scale range of 1 g/hr. The sensor can simultaneously be used as a density sensor.

Original language	English
Title of host publication	Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology
Subtitle of host publication	May 18th-May 22nd 2008, Zürich, Switzerland
Place of Publication	Bedford, UK
Publisher	EUSPEN
Pages	560-564
ISBN (Print)	978-0-9553082-5-3
Publication status	Published - 18 May 2008
Event	10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology - Kongresshaus Zurich, Zürich, Switzerland Duration: 18 May 2008 → 22 May 2008 Conference number: 10

Publication series

Name
Publisher	EUSPEN

Conference

Conference	10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology
Country/Territory	Switzerland
City	Zürich
Period	18/05/08 → 22/05/08
Other	NOT the same as 10th EUSPEN International Conference (see dates and place)

Keywords

METIS-249749
IR-89595

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Cite this

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title = "MEMS-based Micro Coriolis mass flow sensor",

abstract = "We have realized a micromachined micro Coriolis flow sensor consisting of a silicon nitride resonant tube of 40 μm diameter and 1.2 μm wall thickness. First measurements with both gas and liquid flows have demonstrated an unprecedented mass flow resolution in the order of 10 mg/hr at a full scale range of 1 g/hr. The sensor can simultaneously be used as a density sensor.",

keywords = "METIS-249749, IR-89595",

author = "J. Haneveld and Brouwer, {Dannis Michel} and A. Mehendale and R. Zwikker and Lammerink, {Theodorus S.J.} and {de Boer}, {Meint J.} and Wiegerink, {Remco J.}",

year = "2008",

month = may,

day = "18",

language = "English",

isbn = "978-0-9553082-5-3",

publisher = "EUSPEN",

pages = "560--564",

booktitle = "Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology",

note = "10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology ; Conference date: 18-05-2008 Through 22-05-2008",

}

Haneveld, J, Brouwer, DM, Mehendale, A, Zwikker, R, Lammerink, TSJ, de Boer, MJ & Wiegerink, RJ 2008, MEMS-based Micro Coriolis mass flow sensor. in Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology: May 18th-May 22nd 2008, Zürich, Switzerland. EUSPEN, Bedford, UK, pp. 560-564, 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, Zürich, Switzerland, 18/05/08.

MEMS-based Micro Coriolis mass flow sensor. / Haneveld, J.; Brouwer, Dannis Michel; Mehendale, A. et al.

Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology: May 18th-May 22nd 2008, Zürich, Switzerland. Bedford, UK : EUSPEN, 2008. p. 560-564.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - MEMS-based Micro Coriolis mass flow sensor

AU - Haneveld, J.

AU - Brouwer, Dannis Michel

AU - Mehendale, A.

AU - Zwikker, R.

AU - Lammerink, Theodorus S.J.

AU - de Boer, Meint J.

AU - Wiegerink, Remco J.

N1 - Conference code: 10

PY - 2008/5/18

Y1 - 2008/5/18

N2 - We have realized a micromachined micro Coriolis flow sensor consisting of a silicon nitride resonant tube of 40 μm diameter and 1.2 μm wall thickness. First measurements with both gas and liquid flows have demonstrated an unprecedented mass flow resolution in the order of 10 mg/hr at a full scale range of 1 g/hr. The sensor can simultaneously be used as a density sensor.

AB - We have realized a micromachined micro Coriolis flow sensor consisting of a silicon nitride resonant tube of 40 μm diameter and 1.2 μm wall thickness. First measurements with both gas and liquid flows have demonstrated an unprecedented mass flow resolution in the order of 10 mg/hr at a full scale range of 1 g/hr. The sensor can simultaneously be used as a density sensor.

KW - METIS-249749

KW - IR-89595

M3 - Conference contribution

SN - 978-0-9553082-5-3

SP - 560

EP - 564

BT - Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology

PB - EUSPEN

CY - Bedford, UK

T2 - 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology

Y2 - 18 May 2008 through 22 May 2008

ER -

MEMS-based Micro Coriolis mass flow sensor

Abstract

Publication series

Conference

Keywords

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