Abstract
We have realized a micromachined micro Coriolis flow sensor consisting of a silicon nitride resonant tube of 40 μm diameter and 1.2 μm wall thickness. First
measurements with both gas and liquid flows have demonstrated an unprecedented
mass flow resolution in the order of 10 mg/hr at a full scale range of 1 g/hr. The sensor can simultaneously be used as a density sensor.
Original language | English |
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Title of host publication | Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology |
Subtitle of host publication | May 18th-May 22nd 2008, Zürich, Switzerland |
Place of Publication | Bedford, UK |
Publisher | EUSPEN |
Pages | 560-564 |
ISBN (Print) | 978-0-9553082-5-3 |
Publication status | Published - 18 May 2008 |
Event | 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology - Kongresshaus Zurich, Zürich, Switzerland Duration: 18 May 2008 → 22 May 2008 Conference number: 10 |
Publication series
Name | |
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Publisher | EUSPEN |
Conference
Conference | 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology |
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Country/Territory | Switzerland |
City | Zürich |
Period | 18/05/08 → 22/05/08 |
Other | NOT the same as 10th EUSPEN International Conference (see dates and place) |
Keywords
- METIS-249749
- IR-89595