Abstract
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology |
| Subtitle of host publication | May 18th-May 22nd 2008, Zürich, Switzerland |
| Place of Publication | Bedford, UK |
| Publisher | EUSPEN |
| Pages | 560-564 |
| ISBN (Print) | 978-0-9553082-5-3 |
| Publication status | Published - 18 May 2008 |
| Event | 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology - Kongresshaus Zurich, Zürich, Switzerland Duration: 18 May 2008 → 22 May 2008 Conference number: 10 |
Publication series
| Name | |
|---|---|
| Publisher | EUSPEN |
Conference
| Conference | 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology |
|---|---|
| Country | Switzerland |
| City | Zürich |
| Period | 18/05/08 → 22/05/08 |
| Other | NOT the same as 10th EUSPEN International Conference (see dates and place) |
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Keywords
- METIS-249749
- IR-89595
Cite this
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MEMS-based Micro Coriolis mass flow sensor. / Haneveld, J.; Brouwer, Dannis Michel; Mehendale, A.; Zwikker, R.; Lammerink, Theodorus S.J.; de Boer, Meint J.; Wiegerink, Remco J.
Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology: May 18th-May 22nd 2008, Zürich, Switzerland. Bedford, UK : EUSPEN, 2008. p. 560-564.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
TY - GEN
T1 - MEMS-based Micro Coriolis mass flow sensor
AU - Haneveld, J.
AU - Brouwer, Dannis Michel
AU - Mehendale, A.
AU - Zwikker, R.
AU - Lammerink, Theodorus S.J.
AU - de Boer, Meint J.
AU - Wiegerink, Remco J.
PY - 2008/5/18
Y1 - 2008/5/18
N2 - We have realized a micromachined micro Coriolis flow sensor consisting of a silicon nitride resonant tube of 40 μm diameter and 1.2 μm wall thickness. First measurements with both gas and liquid flows have demonstrated an unprecedented mass flow resolution in the order of 10 mg/hr at a full scale range of 1 g/hr. The sensor can simultaneously be used as a density sensor.
AB - We have realized a micromachined micro Coriolis flow sensor consisting of a silicon nitride resonant tube of 40 μm diameter and 1.2 μm wall thickness. First measurements with both gas and liquid flows have demonstrated an unprecedented mass flow resolution in the order of 10 mg/hr at a full scale range of 1 g/hr. The sensor can simultaneously be used as a density sensor.
KW - METIS-249749
KW - IR-89595
M3 - Conference contribution
SN - 978-0-9553082-5-3
SP - 560
EP - 564
BT - Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology
PB - EUSPEN
CY - Bedford, UK
ER -