MEMS-based Micro Coriolis mass flow sensor

J. Haneveld, Dannis Michel Brouwer, A. Mehendale, R. Zwikker, Theodorus S.J. Lammerink, Meint J. de Boer, Remco J. Wiegerink

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
39 Downloads (Pure)

Abstract

We have realized a micromachined micro Coriolis flow sensor consisting of a silicon nitride resonant tube of 40 μm diameter and 1.2 μm wall thickness. First measurements with both gas and liquid flows have demonstrated an unprecedented mass flow resolution in the order of 10 mg/hr at a full scale range of 1 g/hr. The sensor can simultaneously be used as a density sensor.
Original languageEnglish
Title of host publicationProceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology
Subtitle of host publicationMay 18th-May 22nd 2008, Zürich, Switzerland
Place of PublicationBedford, UK
PublisherEUSPEN
Pages560-564
ISBN (Print)978-0-9553082-5-3
Publication statusPublished - 18 May 2008
Event10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology - Kongresshaus Zurich, Zürich, Switzerland
Duration: 18 May 200822 May 2008
Conference number: 10

Publication series

Name
PublisherEUSPEN

Conference

Conference10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology
CountrySwitzerland
CityZürich
Period18/05/0822/05/08
OtherNOT the same as 10th EUSPEN International Conference (see dates and place)

Fingerprint

mass flow
microelectromechanical systems
sensors
liquid flow
silicon nitrides
gas flow
tubes

Keywords

  • METIS-249749
  • IR-89595

Cite this

Haneveld, J., Brouwer, D. M., Mehendale, A., Zwikker, R., Lammerink, T. S. J., de Boer, M. J., & Wiegerink, R. J. (2008). MEMS-based Micro Coriolis mass flow sensor. In Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology: May 18th-May 22nd 2008, Zürich, Switzerland (pp. 560-564). Bedford, UK: EUSPEN.
Haneveld, J. ; Brouwer, Dannis Michel ; Mehendale, A. ; Zwikker, R. ; Lammerink, Theodorus S.J. ; de Boer, Meint J. ; Wiegerink, Remco J. / MEMS-based Micro Coriolis mass flow sensor. Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology: May 18th-May 22nd 2008, Zürich, Switzerland. Bedford, UK : EUSPEN, 2008. pp. 560-564
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abstract = "We have realized a micromachined micro Coriolis flow sensor consisting of a silicon nitride resonant tube of 40 μm diameter and 1.2 μm wall thickness. First measurements with both gas and liquid flows have demonstrated an unprecedented mass flow resolution in the order of 10 mg/hr at a full scale range of 1 g/hr. The sensor can simultaneously be used as a density sensor.",
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author = "J. Haneveld and Brouwer, {Dannis Michel} and A. Mehendale and R. Zwikker and Lammerink, {Theodorus S.J.} and {de Boer}, {Meint J.} and Wiegerink, {Remco J.}",
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month = "5",
day = "18",
language = "English",
isbn = "978-0-9553082-5-3",
publisher = "EUSPEN",
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Haneveld, J, Brouwer, DM, Mehendale, A, Zwikker, R, Lammerink, TSJ, de Boer, MJ & Wiegerink, RJ 2008, MEMS-based Micro Coriolis mass flow sensor. in Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology: May 18th-May 22nd 2008, Zürich, Switzerland. EUSPEN, Bedford, UK, pp. 560-564, 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, Zürich, Switzerland, 18/05/08.

MEMS-based Micro Coriolis mass flow sensor. / Haneveld, J.; Brouwer, Dannis Michel; Mehendale, A.; Zwikker, R.; Lammerink, Theodorus S.J.; de Boer, Meint J.; Wiegerink, Remco J.

Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology: May 18th-May 22nd 2008, Zürich, Switzerland. Bedford, UK : EUSPEN, 2008. p. 560-564.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T1 - MEMS-based Micro Coriolis mass flow sensor

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AU - Brouwer, Dannis Michel

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AU - Lammerink, Theodorus S.J.

AU - de Boer, Meint J.

AU - Wiegerink, Remco J.

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N2 - We have realized a micromachined micro Coriolis flow sensor consisting of a silicon nitride resonant tube of 40 μm diameter and 1.2 μm wall thickness. First measurements with both gas and liquid flows have demonstrated an unprecedented mass flow resolution in the order of 10 mg/hr at a full scale range of 1 g/hr. The sensor can simultaneously be used as a density sensor.

AB - We have realized a micromachined micro Coriolis flow sensor consisting of a silicon nitride resonant tube of 40 μm diameter and 1.2 μm wall thickness. First measurements with both gas and liquid flows have demonstrated an unprecedented mass flow resolution in the order of 10 mg/hr at a full scale range of 1 g/hr. The sensor can simultaneously be used as a density sensor.

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KW - IR-89595

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Haneveld J, Brouwer DM, Mehendale A, Zwikker R, Lammerink TSJ, de Boer MJ et al. MEMS-based Micro Coriolis mass flow sensor. In Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology: May 18th-May 22nd 2008, Zürich, Switzerland. Bedford, UK: EUSPEN. 2008. p. 560-564