MEMS-based nanotechnology

    Research output: Chapter in Book/Report/Conference proceedingChapterAcademic

    Original languageUndefined
    Title of host publicationEncyclopedia of nanoscience and nanotechnology
    EditorsH.S. Nalwa
    PublisherAmerican Scientific Publishers
    Pages163-275
    ISBN (Print)1-58883-061-6
    Publication statusPublished - 2004

    Keywords

    • METIS-218306

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