MEMS-based nanotechnology

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic

Original language	Undefined
Title of host publication	Encyclopedia of nanoscience and nanotechnology
Editors	H.S. Nalwa
Publisher	American Scientific Publishers
Pages	163-275
ISBN (Print)	1-58883-061-6
Publication status	Published - 2004

Keywords

@inbook{7b0df64b8e3545408d3f147de0412965,

title = "MEMS-based nanotechnology",

keywords = "METIS-218306",

author = "Jansen, {Henricus V.} and Tas, {Niels Roelof} and Berenschot, {Johan W.}",

year = "2004",

language = "Undefined",

isbn = "1-58883-061-6",

pages = "163--275",

editor = "H.S. Nalwa",

booktitle = "Encyclopedia of nanoscience and nanotechnology",

publisher = "American Scientific Publishers",

address = "United States",

}