MEMS and AFM-based surface modification techniques and applications are presented in the dissertation. The starting point of the work was the investigation of tribology at microscale. Motivation of the work and general approach of the subject are presented in the introduction, followed by the background of microtribology. The most important historical progresses of tribology as science are pointed, on which the microtribology has been developed.
|Award date||4 Mar 2005|
|Place of Publication||Enschede|
|Publication status||Published - 4 Mar 2005|