MEMS generated and afm-based surface modification

Szabolcs Deladi

MEMS generated and afm-based surface modification

Szabolcs Deladi

Research output: Thesis › PhD Thesis - Research UT, graduation UT

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Abstract

MEMS and AFM-based surface modification techniques and applications are presented in the dissertation. The starting point of the work was the investigation of tribology at microscale. Motivation of the work and general approach of the subject are presented in the introduction, followed by the background of microtribology. The most important historical progresses of tribology as science are pointed, on which the microtribology has been developed.

Original language	English
Awarding Institution	University of Twente
Supervisors/Advisors	Elwenspoek, M.C., Supervisor Krijnen, G. , Co-Supervisor
Award date	4 Mar 2005
Place of Publication	Enschede
Publisher	Twente University Press (TUP)
Print ISBNs	90-365-2138-6
Publication status	Published - 4 Mar 2005

Keywords

METIS-224156
EWI-9792
IR-50289

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title = "MEMS generated and afm-based surface modification",

abstract = "MEMS and AFM-based surface modification techniques and applications are presented in the dissertation. The starting point of the work was the investigation of tribology at microscale. Motivation of the work and general approach of the subject are presented in the introduction, followed by the background of microtribology. The most important historical progresses of tribology as science are pointed, on which the microtribology has been developed.",

keywords = "METIS-224156, EWI-9792, IR-50289",

author = "Szabolcs Deladi",

note = "Dutch Technology Foundation (STW) project no. TET.5120 “Contactless detection and monitoring of micro- and macro-wear using imaging methods”.",

year = "2005",

month = mar,

day = "4",

language = "English",

isbn = "90-365-2138-6",

publisher = "Twente University Press (TUP)",

address = "Netherlands",

school = "University of Twente",

}

TY - THES

T1 - MEMS generated and afm-based surface modification

AU - Deladi, Szabolcs

N1 - Dutch Technology Foundation (STW) project no. TET.5120 “Contactless detection and monitoring of micro- and macro-wear using imaging methods”.

PY - 2005/3/4

Y1 - 2005/3/4

N2 - MEMS and AFM-based surface modification techniques and applications are presented in the dissertation. The starting point of the work was the investigation of tribology at microscale. Motivation of the work and general approach of the subject are presented in the introduction, followed by the background of microtribology. The most important historical progresses of tribology as science are pointed, on which the microtribology has been developed.

AB - MEMS and AFM-based surface modification techniques and applications are presented in the dissertation. The starting point of the work was the investigation of tribology at microscale. Motivation of the work and general approach of the subject are presented in the introduction, followed by the background of microtribology. The most important historical progresses of tribology as science are pointed, on which the microtribology has been developed.

KW - METIS-224156

KW - EWI-9792

KW - IR-50289

M3 - PhD Thesis - Research UT, graduation UT

SN - 90-365-2138-6

PB - Twente University Press (TUP)

CY - Enschede

ER -

MEMS generated and afm-based surface modification

Abstract

Keywords

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