MEMS generated and afm-based surface modification

Szabolcs Deladi

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    57 Downloads (Pure)

    Abstract

    MEMS and AFM-based surface modification techniques and applications are presented in the dissertation. The starting point of the work was the investigation of tribology at microscale. Motivation of the work and general approach of the subject are presented in the introduction, followed by the background of microtribology. The most important historical progresses of tribology as science are pointed, on which the microtribology has been developed.
    Original languageEnglish
    Awarding Institution
    • University of Twente
    Supervisors/Advisors
    • Elwenspoek, M.C., Supervisor
    • Krijnen, G. , Co-Supervisor
    Award date4 Mar 2005
    Place of PublicationEnschede
    Publisher
    Print ISBNs90-365-2138-6
    Publication statusPublished - 4 Mar 2005

    Keywords

    • METIS-224156
    • EWI-9792
    • IR-50289

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