MEMS within a Swagelok®: a new platform for microfluidic devices

S. Unnikrishnan, Henricus V. Jansen, Johan W. Berenschot, B. Mogulkoc, Michael Curt Elwenspoek

    Research output: Contribution to journalArticleAcademicpeer-review

    12 Citations (Scopus)
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    Engineering