@inproceedings{8b6cef3e808a4caeae15d909bebd1a31,
title = "Metal contacts to lowly doped Si and ultra thin SOI",
abstract = "We present our investigations on the fabrication of ohmic and Schottky contacts of several metals on lowly doped bulk Si and SOI wafers. Through this paper we evaluate the fabrication of rectifying devices in which no doping is intentionally introduced.",
keywords = "SC-ICF: Integrated Circuit Fabrication, IR-65430, METIS-263781, EWI-15226",
author = "B. Rajasekharan and Cora Salm and Wolters, {Robertus A.M.} and Aarnink, {Antonius A.I.} and A. Boogaard and Jurriaan Schmitz",
note = "http://chalmers2009.eurosoi.org/; null ; Conference date: 19-01-2009 Through 21-01-2009",
year = "2009",
month = jan,
day = "18",
language = "Undefined",
isbn = "not assigned",
publisher = "Chalmers University of Technology",
pages = "29--30",
booktitle = "Proceedings of Fifth Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits",
}