Metal-Containing Polymers for High-Performance Resist Applications

Research output: Chapter in Book/Report/Conference proceedingChapterAcademic

Original languageUndefined
Title of host publicationMacromolecules Containing Metal and Metal-Like Elements: Organoiron Polymers
EditorsA.S. Abd-El-Aziz, C.E. Carraher Jr., C.U. Pittman Jr., J.E. Sheats, M. Zeldin
PublisherWiley Inter Science
Pages115-133
Number of pages19
ISBN (Print)0-471-45078-2
DOIs
Publication statusPublished - 2004

Publication series

Name
Number2

Keywords

  • METIS-221816

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