Metal-Containing Polymers for High-Performance Resist Applications

Research output: Chapter in Book/Report/Conference proceedingChapterAcademic

Original languageUndefined
Title of host publicationMacromolecules Containing Metal and Metal-Like Elements: Organoiron Polymers
EditorsA.S. Abd-El-Aziz, C.E. Carraher Jr., C.U. Pittman Jr., J.E. Sheats, M. Zeldin
PublisherWiley Inter Science
Pages115-133
Number of pages19
ISBN (Print)0-471-45078-2
DOIs
Publication statusPublished - 2004

Publication series

Name
Number2

Keywords

  • METIS-221816

Cite this

Lammertink, R. G. H., Korczagin, I., Hempenius, M. A., & Vancso, G. J. (2004). Metal-Containing Polymers for High-Performance Resist Applications. In A. S. Abd-El-Aziz, C. E. Carraher Jr., C. U. Pittman Jr., J. E. Sheats, & M. Zeldin (Eds.), Macromolecules Containing Metal and Metal-Like Elements: Organoiron Polymers (pp. 115-133). Wiley Inter Science. https://doi.org/10.1002/0471466573.ch7