@inbook{88f83836eb354050b661b2fb88ef8a13,
title = "Metal-Containing Polymers for High-Performance Resist Applications",
keywords = "METIS-221816",
author = "Lammertink, {Rob G.H.} and I. Korczagin and Hempenius, {Mark A.} and Vancso, {Gyula J.}",
year = "2004",
doi = "10.1002/0471466573.ch7",
language = "Undefined",
isbn = "0-471-45078-2",
publisher = "Wiley",
number = "2",
pages = "115--133",
editor = "A.S. Abd-El-Aziz and {Carraher Jr.}, C.E. and {Pittman Jr.}, C.U. and J.E. Sheats and M. Zeldin",
booktitle = "Macromolecules Containing Metal and Metal-Like Elements: Organoiron Polymers",
address = "United States",
}