Metal-Containing Polymers for High-Performance Resist Applications

Rob G.H. Lammertink; I. Korczagin; Mark A. Hempenius; Gyula J. Vancso

doi:10.1002/0471466573.ch7

Metal-Containing Polymers for High-Performance Resist Applications

Rob G.H. Lammertink, I. Korczagin, Mark A. Hempenius, Gyula J. Vancso

Materials Science and Technology of Polymers

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic

Original language	Undefined
Title of host publication	Macromolecules Containing Metal and Metal-Like Elements: Organoiron Polymers
Editors	A.S. Abd-El-Aziz, C.E. Carraher Jr., C.U. Pittman Jr., J.E. Sheats, M. Zeldin
Publisher	Wiley Inter Science
Pages	115-133
Number of pages	19
ISBN (Print)	0-471-45078-2
DOIs	https://doi.org/10.1002/0471466573.ch7
Publication status	Published - 2004

Publication series

Name
Number	2

Keywords

METIS-221816

Access to Document

10.1002/0471466573.ch7

Cite this

Lammertink, R. G. H., Korczagin, I., Hempenius, M. A., & Vancso, G. J. (2004). Metal-Containing Polymers for High-Performance Resist Applications. In A. S. Abd-El-Aziz, C. E. Carraher Jr., C. U. Pittman Jr., J. E. Sheats, & M. Zeldin (Eds.), Macromolecules Containing Metal and Metal-Like Elements: Organoiron Polymers (pp. 115-133). Wiley Inter Science. https://doi.org/10.1002/0471466573.ch7

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year = "2004",

doi = "10.1002/0471466573.ch7",

language = "Undefined",

isbn = "0-471-45078-2",

publisher = "Wiley Inter Science",

number = "2",

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editor = "A.S. Abd-El-Aziz and {Carraher Jr.}, C.E. and {Pittman Jr.}, C.U. and J.E. Sheats and M. Zeldin",

booktitle = "Macromolecules Containing Metal and Metal-Like Elements: Organoiron Polymers",

}

Metal-Containing Polymers for High-Performance Resist Applications. / Lammertink, Rob G.H.; Korczagin, I.; Hempenius, Mark A.; Vancso, Gyula J.

Macromolecules Containing Metal and Metal-Like Elements: Organoiron Polymers. ed. / A.S. Abd-El-Aziz; C.E. Carraher Jr.; C.U. Pittman Jr.; J.E. Sheats; M. Zeldin. Wiley Inter Science, 2004. p. 115-133.

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic

TY - CHAP

T1 - Metal-Containing Polymers for High-Performance Resist Applications

AU - Lammertink, Rob G.H.

AU - Korczagin, I.

AU - Hempenius, Mark A.

AU - Vancso, Gyula J.

PY - 2004

Y1 - 2004

KW - METIS-221816

U2 - 10.1002/0471466573.ch7

DO - 10.1002/0471466573.ch7

M3 - Chapter

SN - 0-471-45078-2

SP - 115

EP - 133

BT - Macromolecules Containing Metal and Metal-Like Elements: Organoiron Polymers

A2 - Abd-El-Aziz, A.S.

A2 - Carraher Jr., C.E.

A2 - Pittman Jr., C.U.

A2 - Sheats, J.E.

A2 - Zeldin, M.

PB - Wiley Inter Science

ER -