@inbook{88f83836eb354050b661b2fb88ef8a13,
title = "Metal-Containing Polymers for High-Performance Resist Applications",
keywords = "METIS-221816",
author = "Lammertink, \{Rob G.H.\} and I. Korczagin and Hempenius, \{Mark A.\} and Vancso, \{Gyula J.\}",
year = "2004",
doi = "10.1002/0471466573.ch7",
language = "Undefined",
isbn = "0-471-45078-2",
publisher = "Wiley",
number = "2",
pages = "115--133",
editor = "A.S. Abd-El-Aziz and \{Carraher Jr.\}, C.E. and \{Pittman Jr.\}, C.U. and J.E. Sheats and M. Zeldin",
booktitle = "Macromolecules Containing Metal and Metal-Like Elements: Organoiron Polymers",
address = "United States",
}