Metal thin film thermocouples for use in MST

P.J. Leussink, Henricus V. Jansen, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the 13th European Conference on Solid state transducers
Place of Publication	Den Haag
Pages	205-206
Publication status	Published - 12 Sept 1999
Event	13th European Conference on Solid-State Transducers, EUROSENSORS XIII - The Hague, The Netherlands, Den Haag Duration: 12 Sept 1999 → 15 Sept 1999

Conference	13th European Conference on Solid-State Transducers, EUROSENSORS XIII
City	Den Haag
Period	12/09/99 → 15/09/99
Other	September 12-15, 1999

Keywords

@inproceedings{e992763b69604cf2a6432977e7ce821b,

title = "Metal thin film thermocouples for use in MST",

keywords = "METIS-112710, IR-15828",

author = "P.J. Leussink and Jansen, {Henricus V.} and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",

year = "1999",

month = sep,

day = "12",

language = "Undefined",

pages = "205--206",

booktitle = "Proceedings of the 13th European Conference on Solid state transducers",

note = "13th European Conference on Solid-State Transducers, EUROSENSORS XIII ; Conference date: 12-09-1999 Through 15-09-1999",

}

TY - GEN

T1 - Metal thin film thermocouples for use in MST

AU - Leussink, P.J.

AU - Jansen, Henricus V.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

PY - 1999/9/12

Y1 - 1999/9/12

KW - METIS-112710

KW - IR-15828

M3 - Conference contribution

SP - 205

EP - 206

BT - Proceedings of the 13th European Conference on Solid state transducers

CY - Den Haag

T2 - 13th European Conference on Solid-State Transducers, EUROSENSORS XIII

Y2 - 12 September 1999 through 15 September 1999

ER -