Metallization Issues in the IC backend

Svetlana Nikolajevna van Nieuwkasteele-Bystrova, J. Holleman, H. van Kranenburg, F.G. Kuper, A.J. Mouthaan, V. Nguyen Hoang, Van Hieu Nguyen, Cora Salm, P.H. Woerlee

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationEnschede, The Netherlands
    Publication statusPublished - 12 Oct 2000

    Keywords

    • METIS-114843

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