Metallization Issues in the IC backend

Svetlana Nikolajevna van Nieuwkasteele-Bystrova; J. Holleman; H. van Kranenburg; F.G. Kuper; A.J. Mouthaan; V. Nguyen Hoang; Van Hieu Nguyen; Cora Salm; P.H. Woerlee

Metallization Issues in the IC backend

Svetlana Nikolajevna van Nieuwkasteele-Bystrova, J. Holleman, H. van Kranenburg, F.G. Kuper, A.J. Mouthaan, V. Nguyen Hoang, Van Hieu Nguyen, Cora Salm, P.H. Woerlee

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	Enschede, The Netherlands
Publication status	Published - 12 Oct 2000

Keywords

METIS-114843

Cite this

@misc{160c1d7a93c7487ca760c0548a0bab84,

title = "Metallization Issues in the IC backend",

keywords = "METIS-114843",

author = "{van Nieuwkasteele-Bystrova}, {Svetlana Nikolajevna} and J. Holleman and {van Kranenburg}, H. and F.G. Kuper and A.J. Mouthaan and {Nguyen Hoang}, V. and Nguyen, {Van Hieu} and Cora Salm and P.H. Woerlee",

year = "2000",

month = oct,

day = "12",

language = "Undefined",

type = "Other",

}

TY - GEN

T1 - Metallization Issues in the IC backend

AU - van Nieuwkasteele-Bystrova, Svetlana Nikolajevna

AU - Holleman, J.

AU - van Kranenburg, H.

AU - Kuper, F.G.

AU - Mouthaan, A.J.

AU - Nguyen Hoang, V.

AU - Nguyen, Van Hieu

AU - Salm, Cora

AU - Woerlee, P.H.

PY - 2000/10/12

Y1 - 2000/10/12

KW - METIS-114843

M3 - Other contribution

CY - Enschede, The Netherlands

ER -