An interconnect module and a method of manufacturing the same. The method of making an interconnect module on a substrate comprises forming an interconnect section on the substrate. The interconnect section comprises at least two metal interconnect layers separated by a dielectric layer. The method further comprises forming a passive device on the substrate at a location laterally adjacent to the interconnect section. The passive device comprises at least one moveable element comprising a metal layer. The method further comprises forming the metal layer and one of the at least two metal interconnect layers from substantially the same material.
|Patent number||US2005003606 (A1)|
|Publication status||Published - 6 Jan 2005|
Tilmans, H., Beyne, E., Jansen, H. V., & De Raedt, W. (2005). Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. (Patent No. US2005003606 (A1)).