Method, apparatus and computer program for measuring and processing a spectrum of an xuv light source from soft x-rays to infrared wavelengths

Muharrem  Bayraktar; Fred Bijkerk; H.M.J. Bastiaens; Casper Bruineman

Method, apparatus and computer program for measuring and processing a spectrum of an xuv light source from soft x-rays to infrared wavelengths

Muharrem Bayraktar (Inventor), Fred Bijkerk (Inventor), H.M.J. Bastiaens (Inventor), Casper Bruineman (Inventor)

Research output: Patent

Original language	English
Patent number	17817219.3 - 1020
Publication status	Published - 13 Jun 2019

Cite this

@misc{3d1f69e7763a4f65bfbe862dee452eb9,

title = "Method, apparatus and computer program for measuring and processing a spectrum of an xuv light source from soft x-rays to infrared wavelengths",

author = "Muharrem Bayraktar and Fred Bijkerk and H.M.J. Bastiaens and Casper Bruineman",

year = "2019",

month = jun,

day = "13",

language = "English",

publisher = "European Patent Office",

address = "Germany",

type = "Patent",

note = "17817219.3 - 1020",

}