Method, apparatus and computer program for measuring and processing a spectrum of an XUV light source from soft x-rays to infrared wavelengths

F. Bijkerk (Inventor), Muharrem Bayraktar (Inventor), Hubertus M.J. Bastiaens (Inventor), C. Bruineman (Inventor)

Research output: Patent

Original languageEnglish
Patent number2017729 IDF
IPC164742.NL Dokter Octrooibureau,WO2018/084708 A1
Priority date7/11/16
Publication statusPublished - 11 May 2018


  • METIS-319120

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