Method, apparatus and computer program for measuring and processing a spectrum of an XUV light source from soft x-rays to infrared wavelengths

F. Bijkerk; Muharrem  Bayraktar; Hubertus M.J. Bastiaens; C. Bruineman

Method, apparatus and computer program for measuring and processing a spectrum of an XUV light source from soft x-rays to infrared wavelengths

F. Bijkerk (Inventor)
, Muharrem Bayraktar (Inventor)
, Hubertus M.J. Bastiaens (Inventor)
, C. Bruineman (Inventor)

Research output: Patent

Original language	English
Patent number	2017729 IDF
IPC	164742.NL Dokter Octrooibureau,WO2018/084708 A1
Priority date	7/11/16
Publication status	Published - 11 May 2018

Keywords

METIS-319120

Access to Document

https://nl.espacenet.com/publicationDetails/biblio?DB=EPODOC&II=0&ND=3&adjacent=true&locale=nl_NL&FT=D&date=20180523&CC=NL&NR=2017729B1&KC=B1#

Cite this

Bijkerk, F., Bayraktar, M., Bastiaens, H. M. J., & Bruineman, C. (2018). Method, apparatus and computer program for measuring and processing a spectrum of an XUV light source from soft x-rays to infrared wavelengths. (Patent No. 2017729 IDF). https://nl.espacenet.com/publicationDetails/biblio?DB=EPODOC&II=0&ND=3&adjacent=true&locale=nl_NL&FT=D&date=20180523&CC=NL&NR=2017729B1&KC=B1#

@misc{ab17e6469f8b4c1d8aecd9826929d017,

title = "Method, apparatus and computer program for measuring and processing a spectrum of an XUV light source from soft x-rays to infrared wavelengths",

keywords = "METIS-319120",

author = "F. Bijkerk and Muharrem Bayraktar and Bastiaens, \{Hubertus M.J.\} and C. Bruineman",

year = "2018",

month = may,

day = "11",

language = "English",

type = "Patent",

note = "2017729 IDF; 164742.NL Dokter Octrooibureau,WO2018/084708 A1",

}

Bijkerk, F , Bayraktar, M, Bastiaens, HMJ & Bruineman, C May. 11 2018, Method, apparatus and computer program for measuring and processing a spectrum of an XUV light source from soft x-rays to infrared wavelengths, Patent No. 2017729 IDF. <https://nl.espacenet.com/publicationDetails/biblio?DB=EPODOC&II=0&ND=3&adjacent=true&locale=nl_NL&FT=D&date=20180523&CC=NL&NR=2017729B1&KC=B1#>