Method for manufacturing a multilayer structure with a lateral pattern for application in the XUV wavelength range, and BF and LMAG structures manufactured according to this method

Frederik Bijkerk (Inventor), Wilfred Gerard van der Wiel (Inventor), R. van der Meer (Inventor), P.E. Hegeman (Inventor)

Research output: Patent

11 Downloads (Pure)
Original languageEnglish
Patent numberWO 2011/071380 A1
Priority date16/06/11
Publication statusSubmitted - 16 Jun 2011

Keywords

  • IR-84166
  • METIS-278153

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