Method for manufacturing a multilayer structure with a lateral pattern for application in the XUV wavelength range, and BF and LMAG structures manufactured according to this method

Frederik Bijkerk; Wilfred Gerard van der Wiel; R. van der Meer; P.E. Hegeman

Method for manufacturing a multilayer structure with a lateral pattern for application in the XUV wavelength range, and BF and LMAG structures manufactured according to this method

Frederik Bijkerk (Inventor), Wilfred Gerard van der Wiel (Inventor), R. van der Meer (Inventor), P.E. Hegeman (Inventor)

Research output: Patent

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Original language	English
Patent number	WO 2011/071380 A1
Priority date	16/06/11
Publication status	Submitted - 16 Jun 2011

Keywords

IR-84166
METIS-278153

Access to Document

Bijkerk2011

Cite this

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title = "Method for manufacturing a multilayer structure with a lateral pattern for application in the XUV wavelength range, and BF and LMAG structures manufactured according to this method",

keywords = "IR-84166, METIS-278153",

author = "Frederik Bijkerk and {van der Wiel}, {Wilfred Gerard} and {van der Meer}, R. and P.E. Hegeman",

year = "2011",

month = jun,

day = "16",

language = "English",

type = "Patent",

note = "WO 2011/071380 A1",

}

TY - PAT

T1 - Method for manufacturing a multilayer structure with a lateral pattern for application in the XUV wavelength range, and BF and LMAG structures manufactured according to this method

AU - Bijkerk, Frederik

AU - van der Wiel, Wilfred Gerard

AU - van der Meer, R.

AU - Hegeman, P.E.

PY - 2011/6/16

Y1 - 2011/6/16

KW - IR-84166

KW - METIS-278153

M3 - Patent

M1 - WO 2011/071380 A1

ER -