Method for manufacturing a multilayer structure with a lateral pattern for application in the XUV wavelength range, and BF and LMAG structures manufactured according to this method

Frederik Bijkerk; Wilfred Gerard van der Wiel; R. van der Meer; P.E. Hegeman

Method for manufacturing a multilayer structure with a lateral pattern for application in the XUV wavelength range, and BF and LMAG structures manufactured according to this method

Frederik Bijkerk (Inventor), Wilfred Gerard van der Wiel (Inventor), R. van der Meer (Inventor), P.E. Hegeman (Inventor)

Research output: Patent

Original language	English
Patent number	10769182.3
Publication status	Submitted - 2010

Keywords

METIS-316945

Cite this

@misc{c3d7dde50a8f4c6395bccc9ad93a1e73,

title = "Method for manufacturing a multilayer structure with a lateral pattern for application in the XUV wavelength range, and BF and LMAG structures manufactured according to this method",

keywords = "METIS-316945",

author = "Frederik Bijkerk and {van der Wiel}, {Wilfred Gerard} and {van der Meer}, R. and P.E. Hegeman",

year = "2010",

language = "English",

type = "Patent",

note = "10769182.3",

}