| Original language | English |
|---|---|
| Patent number | WO 2005/061377 A1 |
| Priority date | 7/07/05 |
| Publication status | Submitted - 7 Jul 2005 |
Keywords
- METIS-231049
Method for Manufacturing a Nanostructure
Edin Sarajlic (Inventor), Johan W. Berenschot (Inventor)
Research output: Patent