| Original language | English |
|---|---|
| Patent number | WO 2005/061377 A1 |
| Priority date | 7/07/05 |
| Publication status | Submitted - 7 Jul 2005 |
Keywords
- METIS-231049
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Method for Manufacturing a Nanostructure
- Edin Sarajlic (Inventor)
- , Johan W. Berenschot (Inventor)
Research output: Patent