Method for producing a reflective optical element for EUV-lithography

Alexey Kuznetsov (Inventor), M.A. Gleeson (Inventor), Robbert Wilhelmus Elisabeth van de Kruijs (Inventor), Frederik Bijkerk (Inventor)

Research output: Patent

Original languageEnglish
Patent number14/137,225
Priority date20/12/13
Publication statusIn preparation - 10 Jul 2014

Keywords

  • METIS-304583
  • IR-103308

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