Method for producing a reflective optical element for EUV-lithography

Alexey Kuznetsov (Inventor), M.A. Gleeson (Inventor), Robbert Wilhelmus Elisabeth van de Kruijs (Inventor), Frederik Bijkerk (Inventor)

Research output: PatentProfessional

Original languageEnglish
Patent number14/137,225
Priority date20/12/13
Publication statusIn preparation - 10 Jul 2014

Keywords

  • METIS-304583
  • IR-103308

Cite this

Kuznetsov, A., Gleeson, M. A., van de Kruijs, R. W. E., & Bijkerk, F. (2014). Method for producing a reflective optical element for EUV-lithography. Manuscript in preparation. (Patent No. 14/137,225).
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Method for producing a reflective optical element for EUV-lithography. / Kuznetsov, Alexey (Inventor); Gleeson, M.A. (Inventor); van de Kruijs, Robbert Wilhelmus Elisabeth (Inventor); Bijkerk, Frederik (Inventor).

Patent No.: 14/137,225.

Research output: PatentProfessional

TY - PAT

T1 - Method for producing a reflective optical element for EUV-lithography

AU - Kuznetsov, Alexey

AU - Gleeson, M.A.

AU - van de Kruijs, Robbert Wilhelmus Elisabeth

AU - Bijkerk, Frederik

PY - 2014/7/10

Y1 - 2014/7/10

KW - METIS-304583

KW - IR-103308

M3 - Patent

M1 - 14/137,225

ER -