Method for producing a (sub)micron pattern on a substrate, and the produced substrate

M. Liebau (Inventor), Jurriaan Huskens (Inventor), David Reinhoudt (Inventor)

Research output: Patent

Keywords

@misc{ea131ba2b25e47418887c00ace8ca274,

title = "Method for producing a (sub)micron pattern on a substrate, and the produced substrate",

keywords = "METIS-111282",

author = "M. Liebau and Jurriaan Huskens and David Reinhoudt",

note = "Aanvraag octrooi door UT-er ; 1e 00202404.0-2208,",

year = "2000",

month = jul,

day = "6",

language = "Undefined",

type = "Patent",

}