Method of fabricating a micro machined channel

Yiyuan Zhao (Inventor), Henk-Willem Veltkamp (Inventor), Yaxiang Zeng (Inventor), Joost Conrad Lötters (Inventor), Remco J. Wiegerink (Inventor)

Research output: Patent

16 Downloads (Pure)


The invention relates to a method of fabricating a micro machined channel, comprising the steps of providing a substrate of a first material and having a buried layer of a different material therein, and forming at least two trenches in said substrate by removing at least part of said substrate. Said trenches are provided at a distance from each other and at least partly extend substantially parallel to each other, as well as towards said buried layer. The method comprises the step of forming at least two filled trenches by providing a second material different from said first material and filling said at least two trenches with at least said second material; forming an elongated cavity in between said filled trenches by removing at least part of said substrate extending between said filled trenches; and forming an enclosed channel by providing a layer of material in said cavity and enclosing said cavity.
Original languageEnglish
Patent numberWO2019054873A1
Priority date15/09/18
Filing date17/09/18
Publication statusPublished - 17 Sep 2018


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