MI004 miniaturised, high performance ferroelectric and piezoelectric thin film devices

M. Klee, W. Keur, R. Mauczok, H. van Esch, M. de Wild, J. Liu, A. Roest, K. Reimann, Ch. Renders, L. Peters, M.P.J. Tiggelman, O. Wunnicke, K. Neumann

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    2 Citations (Scopus)
    19 Downloads (Pure)


    Thin film ferroelectric capacitors have been integrated with resistors and active functions such as ESD protection into small, miniaturized modules, which enable a board space saving of up to 80%. With the optimum materials and processes, integrated capacitors with capacitance densities of up to 100 nF/mm2 and breakdown voltages of exceeding 90 V have been achieved. The integration of these high density capacitors with extremely high breakdown voltage is a revolution in the world of passive components and has not yet been achieved in any other passive integration technology. Furthermore, thin film tunable capacitors based on barium strontium titanate with high tuning range and high quality factor at 1 GHz have been demonstrated. Finally, piezoelectric thin films for piezoelectric switches with high switching speed have been realized.
    Original languageUndefined
    Title of host publication17th IEEE International Symposium on the Applications of Ferroelectrics, 2008. ISAF 2008
    Place of PublicationPiscataway
    PublisherIEEE Computer Society Press
    Number of pages4
    ISBN (Print)978-1-4244-2744-4
    Publication statusPublished - 23 Feb 2008
    Event17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008 - Santa Re, United States
    Duration: 23 Feb 200828 Feb 2008
    Conference number: 17

    Publication series

    PublisherIEEE Computer Society Press


    Conference17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008
    Abbreviated titleISAF
    CountryUnited States
    CitySanta Re


    • SC-CICC: Characterization of IC Components
    • METIS-263749
    • IR-62753
    • EWI-15138

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