Micro-actuator research

Gijsbertus J.M. Krijnen; S. Deladi; S. Saravanan; Remco J. Wiegerink; Theodorus S.J. Lammerink; Niels Roelof Tas; Michael Curt Elwenspoek; Edin Sarajlic

Micro-actuator research

Gijsbertus J.M. Krijnen, S. Deladi, S. Saravanan, Remco J. Wiegerink, Theodorus S.J. Lammerink, Niels Roelof Tas, Michael Curt Elwenspoek, Edin Sarajlic

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 11 Oct 2001
Event	MESA+ Day 2001 - Rabotheater, Hengelo, Netherlands Duration: 11 Oct 2001 → 11 Oct 2001

Conference

Conference	MESA+ Day 2001
Country/Territory	Netherlands
City	Hengelo
Period	11/10/01 → 11/10/01
Other	(MESA+ Meeting/Dag)

Keywords

METIS-201183

Cite this

@conference{72859d06f3004918a4d8dadd42b45432,

title = "Micro-actuator research",

keywords = "METIS-201183",

author = "Krijnen, {Gijsbertus J.M.} and S. Deladi and S. Saravanan and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Tas, {Niels Roelof} and Elwenspoek, {Michael Curt} and Edin Sarajlic",

year = "2001",

month = oct,

day = "11",

language = "Undefined",

pages = "--",

note = "MESA+ Day 2001 ; Conference date: 11-10-2001 Through 11-10-2001",

}

TY - CONF

T1 - Micro-actuator research

AU - Krijnen, Gijsbertus J.M.

AU - Deladi, S.

AU - Saravanan, S.

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Tas, Niels Roelof

AU - Elwenspoek, Michael Curt

AU - Sarajlic, Edin

PY - 2001/10/11

Y1 - 2001/10/11

KW - METIS-201183

M3 - Poster

SP - -

T2 - MESA+ Day 2001

Y2 - 11 October 2001 through 11 October 2001

ER -