Micro-actuator research

Gijsbertus J.M. Krijnen, S. Deladi, S. Saravanan, Remco J. Wiegerink, Theodorus S.J. Lammerink, Niels Roelof Tas, Michael Curt Elwenspoek, Edin Sarajlic

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 11 Oct 2001
    EventMESA+ Day 2001 - Rabotheater, Hengelo, Netherlands
    Duration: 11 Oct 200111 Oct 2001

    Conference

    ConferenceMESA+ Day 2001
    CountryNetherlands
    CityHengelo
    Period11/10/0111/10/01
    Other(MESA+ Meeting/Dag)

    Keywords

    • METIS-201183

    Cite this

    Krijnen, G. J. M., Deladi, S., Saravanan, S., Wiegerink, R. J., Lammerink, T. S. J., Tas, N. R., ... Sarajlic, E. (2001). Micro-actuator research. -. Poster session presented at MESA+ Day 2001, Hengelo, Netherlands.