Micro-actuator research at the Transducers Technology Group

A.A. Kuijpers, S. Deladi, S. Saravanan, Gijsbertus J.M. Krijnen, Remco J. Wiegerink, Theodorus S.J. Lammerink, Johan W. Berenschot, Michael Curt Elwenspoek, Edin Sarajlic

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 11 Oct 2001
    EventMESA+ Day 2001 - Rabotheater, Hengelo, Netherlands
    Duration: 11 Oct 200111 Oct 2001

    Conference

    ConferenceMESA+ Day 2001
    CountryNetherlands
    CityHengelo
    Period11/10/0111/10/01
    Other(MESA+ Meeting/Dag)

    Keywords

    • METIS-200174

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