Micro-actuator research at the Transducers Technology Group

A.A. Kuijpers; S. Deladi; S. Saravanan; Gijsbertus J.M. Krijnen; Remco J. Wiegerink; Theodorus S.J. Lammerink; Johan W. Berenschot; Michael Curt Elwenspoek; Edin Sarajlic

Micro-actuator research at the Transducers Technology Group

A.A. Kuijpers, S. Deladi, S. Saravanan, Gijsbertus J.M. Krijnen, Remco J. Wiegerink, Theodorus S.J. Lammerink, Johan W. Berenschot, Michael Curt Elwenspoek, Edin Sarajlic

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 11 Oct 2001
Event	MESA+ Day 2001 - Rabotheater, Hengelo, Netherlands Duration: 11 Oct 2001 → 11 Oct 2001

Conference

Conference	MESA+ Day 2001
Country/Territory	Netherlands
City	Hengelo
Period	11/10/01 → 11/10/01
Other	(MESA+ Meeting/Dag)

Keywords

METIS-200174

Cite this

@conference{8319a71ab6b8433abcd0fa234d31fb27,

title = "Micro-actuator research at the Transducers Technology Group",

keywords = "METIS-200174",

author = "A.A. Kuijpers and S. Deladi and S. Saravanan and Krijnen, \{Gijsbertus J.M.\} and Wiegerink, \{Remco J.\} and Lammerink, \{Theodorus S.J.\} and Berenschot, \{Johan W.\} and Elwenspoek, \{Michael Curt\} and Edin Sarajlic",

year = "2001",

month = oct,

day = "11",

language = "Undefined",

pages = "--",

note = "MESA+ Day 2001 ; Conference date: 11-10-2001 Through 11-10-2001",

}

TY - CONF

T1 - Micro-actuator research at the Transducers Technology Group

AU - Kuijpers, A.A.

AU - Deladi, S.

AU - Saravanan, S.

AU - Krijnen, Gijsbertus J.M.

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Berenschot, Johan W.

AU - Elwenspoek, Michael Curt

AU - Sarajlic, Edin

PY - 2001/10/11

Y1 - 2001/10/11

KW - METIS-200174

M3 - Poster

SP - -

T2 - MESA+ Day 2001

Y2 - 11 October 2001 through 11 October 2001

ER -