Micro- and nano-link ultra-low power heaters for sensors

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
2 Downloads (Pure)

Abstract

A new microfabricated device for heating and sensing in gases is presented. It is based on the resistive heating of a micro- or nano-metric hollow cylinder of titanium nitride, and measurement of its (temperature-dependent) resistance. This article presents the fabrication and temperature calibration of the device, and illustrates its function as flow meter and thermal conductivity meter. A temperature of 280 ºC is achieved at a power consumption of only 5.5 μW, orders of magnitude less than existing commercial hotplate devices. The thermal time constant can be as low as 60-120 microseconds.
Original languageUndefined
Title of host publicationEuropean Solid-State Device Research Conference, ESSDERC 2012
Place of PublicationUSA
PublisherIEEE Solid-State Circuits Society
Pages169-172
Number of pages4
ISBN (Print)978-1-4673-1706-1
DOIs
Publication statusPublished - 17 Sep 2012
Event42nd European Solid-State Device Research Conference, ESSDERC 2012 - Bordeaux, France
Duration: 17 Sep 201221 Sep 2012
Conference number: 42

Publication series

Name
PublisherIEEE Solid-State Circuits Society

Conference

Conference42nd European Solid-State Device Research Conference, ESSDERC 2012
Abbreviated titleESSDERC
CountryFrance
CityBordeaux
Period17/09/1221/09/12

Keywords

  • EWI-23023
  • METIS-296278
  • IR-90707

Cite this

Groenland, A. W., Vereshchagina, E., Kovalgin, A. Y., Wolters, R. A. M., Gardeniers, J. G. E., & Schmitz, J. (2012). Micro- and nano-link ultra-low power heaters for sensors. In European Solid-State Device Research Conference, ESSDERC 2012 (pp. 169-172). USA: IEEE Solid-State Circuits Society. https://doi.org/10.1109/ESSDERC.2012.6343360
Groenland, A.W. ; Vereshchagina, E. ; Kovalgin, Alexeij Y. ; Wolters, Robertus A.M. ; Gardeniers, Johannes G.E. ; Schmitz, Jurriaan. / Micro- and nano-link ultra-low power heaters for sensors. European Solid-State Device Research Conference, ESSDERC 2012. USA : IEEE Solid-State Circuits Society, 2012. pp. 169-172
@inproceedings{4fe61b3fbac642129af2f5790e91d56b,
title = "Micro- and nano-link ultra-low power heaters for sensors",
abstract = "A new microfabricated device for heating and sensing in gases is presented. It is based on the resistive heating of a micro- or nano-metric hollow cylinder of titanium nitride, and measurement of its (temperature-dependent) resistance. This article presents the fabrication and temperature calibration of the device, and illustrates its function as flow meter and thermal conductivity meter. A temperature of 280 ºC is achieved at a power consumption of only 5.5 μW, orders of magnitude less than existing commercial hotplate devices. The thermal time constant can be as low as 60-120 microseconds.",
keywords = "EWI-23023, METIS-296278, IR-90707",
author = "A.W. Groenland and E. Vereshchagina and Kovalgin, {Alexeij Y.} and Wolters, {Robertus A.M.} and Gardeniers, {Johannes G.E.} and Jurriaan Schmitz",
year = "2012",
month = "9",
day = "17",
doi = "10.1109/ESSDERC.2012.6343360",
language = "Undefined",
isbn = "978-1-4673-1706-1",
publisher = "IEEE Solid-State Circuits Society",
pages = "169--172",
booktitle = "European Solid-State Device Research Conference, ESSDERC 2012",

}

Groenland, AW, Vereshchagina, E, Kovalgin, AY, Wolters, RAM, Gardeniers, JGE & Schmitz, J 2012, Micro- and nano-link ultra-low power heaters for sensors. in European Solid-State Device Research Conference, ESSDERC 2012. IEEE Solid-State Circuits Society, USA, pp. 169-172, 42nd European Solid-State Device Research Conference, ESSDERC 2012, Bordeaux, France, 17/09/12. https://doi.org/10.1109/ESSDERC.2012.6343360

Micro- and nano-link ultra-low power heaters for sensors. / Groenland, A.W.; Vereshchagina, E.; Kovalgin, Alexeij Y.; Wolters, Robertus A.M.; Gardeniers, Johannes G.E.; Schmitz, Jurriaan.

European Solid-State Device Research Conference, ESSDERC 2012. USA : IEEE Solid-State Circuits Society, 2012. p. 169-172.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Micro- and nano-link ultra-low power heaters for sensors

AU - Groenland, A.W.

AU - Vereshchagina, E.

AU - Kovalgin, Alexeij Y.

AU - Wolters, Robertus A.M.

AU - Gardeniers, Johannes G.E.

AU - Schmitz, Jurriaan

PY - 2012/9/17

Y1 - 2012/9/17

N2 - A new microfabricated device for heating and sensing in gases is presented. It is based on the resistive heating of a micro- or nano-metric hollow cylinder of titanium nitride, and measurement of its (temperature-dependent) resistance. This article presents the fabrication and temperature calibration of the device, and illustrates its function as flow meter and thermal conductivity meter. A temperature of 280 ºC is achieved at a power consumption of only 5.5 μW, orders of magnitude less than existing commercial hotplate devices. The thermal time constant can be as low as 60-120 microseconds.

AB - A new microfabricated device for heating and sensing in gases is presented. It is based on the resistive heating of a micro- or nano-metric hollow cylinder of titanium nitride, and measurement of its (temperature-dependent) resistance. This article presents the fabrication and temperature calibration of the device, and illustrates its function as flow meter and thermal conductivity meter. A temperature of 280 ºC is achieved at a power consumption of only 5.5 μW, orders of magnitude less than existing commercial hotplate devices. The thermal time constant can be as low as 60-120 microseconds.

KW - EWI-23023

KW - METIS-296278

KW - IR-90707

U2 - 10.1109/ESSDERC.2012.6343360

DO - 10.1109/ESSDERC.2012.6343360

M3 - Conference contribution

SN - 978-1-4673-1706-1

SP - 169

EP - 172

BT - European Solid-State Device Research Conference, ESSDERC 2012

PB - IEEE Solid-State Circuits Society

CY - USA

ER -

Groenland AW, Vereshchagina E, Kovalgin AY, Wolters RAM, Gardeniers JGE, Schmitz J. Micro- and nano-link ultra-low power heaters for sensors. In European Solid-State Device Research Conference, ESSDERC 2012. USA: IEEE Solid-State Circuits Society. 2012. p. 169-172 https://doi.org/10.1109/ESSDERC.2012.6343360