Micro- and nano-link ultra-low power heaters for sensors

A.W. Groenland; E. Vereshchagina; Alexeij Y. Kovalgin; Robertus A.M. Wolters; Johannes G.E. Gardeniers; Jurriaan Schmitz

doi:10.1109/ESSDERC.2012.6343360

Micro- and nano-link ultra-low power heaters for sensors

A.W. Groenland, E. Vereshchagina, Alexeij Y. Kovalgin, Robertus A.M. Wolters, Johannes G.E. Gardeniers, Jurriaan Schmitz

Mesoscale Chemical Systems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

2 Citations (Scopus)

14 Downloads (Pure)

Abstract

A new microfabricated device for heating and sensing in gases is presented. It is based on the resistive heating of a micro- or nano-metric hollow cylinder of titanium nitride, and measurement of its (temperature-dependent) resistance. This article presents the fabrication and temperature calibration of the device, and illustrates its function as flow meter and thermal conductivity meter. A temperature of 280 ºC is achieved at a power consumption of only 5.5 μW, orders of magnitude less than existing commercial hotplate devices. The thermal time constant can be as low as 60-120 microseconds.

Original language	Undefined
Title of host publication	European Solid-State Device Research Conference, ESSDERC 2012
Place of Publication	USA
Publisher	IEEE
Pages	169-172
Number of pages	4
ISBN (Print)	978-1-4673-1706-1
DOIs	https://doi.org/10.1109/ESSDERC.2012.6343360
Publication status	Published - 17 Sept 2012
Event	42nd European Solid-State Device Research Conference, ESSDERC 2012 - Bordeaux, France Duration: 17 Sept 2012 → 21 Sept 2012 Conference number: 42

Publication series

Name
Publisher	IEEE Solid-State Circuits Society

Conference

Conference	42nd European Solid-State Device Research Conference, ESSDERC 2012
Abbreviated title	ESSDERC
Country/Territory	France
City	Bordeaux
Period	17/09/12 → 21/09/12

Keywords

EWI-23023
METIS-296278
IR-90707

Access to Document

10.1109/ESSDERC.2012.6343360

http://eprints.eemcs.utwente.nl/secure2/23023/01/groenland.PDF

Cite this

@inproceedings{4fe61b3fbac642129af2f5790e91d56b,

title = "Micro- and nano-link ultra-low power heaters for sensors",

abstract = "A new microfabricated device for heating and sensing in gases is presented. It is based on the resistive heating of a micro- or nano-metric hollow cylinder of titanium nitride, and measurement of its (temperature-dependent) resistance. This article presents the fabrication and temperature calibration of the device, and illustrates its function as flow meter and thermal conductivity meter. A temperature of 280 ºC is achieved at a power consumption of only 5.5 μW, orders of magnitude less than existing commercial hotplate devices. The thermal time constant can be as low as 60-120 microseconds.",

keywords = "EWI-23023, METIS-296278, IR-90707",

author = "A.W. Groenland and E. Vereshchagina and Kovalgin, {Alexeij Y.} and Wolters, {Robertus A.M.} and Gardeniers, {Johannes G.E.} and Jurriaan Schmitz",

year = "2012",

month = sep,

day = "17",

doi = "10.1109/ESSDERC.2012.6343360",

language = "Undefined",

isbn = "978-1-4673-1706-1",

publisher = "IEEE",

pages = "169--172",

booktitle = "European Solid-State Device Research Conference, ESSDERC 2012",

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note = "42nd European Solid-State Device Research Conference, ESSDERC 2012 ; Conference date: 17-09-2012 Through 21-09-2012",

}

Groenland, AW, Vereshchagina, E, Kovalgin, AY, Wolters, RAM, Gardeniers, JGE & Schmitz, J 2012, Micro- and nano-link ultra-low power heaters for sensors. in European Solid-State Device Research Conference, ESSDERC 2012. IEEE, USA, pp. 169-172, 42nd European Solid-State Device Research Conference, ESSDERC 2012, Bordeaux, France, 17/09/12. https://doi.org/10.1109/ESSDERC.2012.6343360

TY - GEN

T1 - Micro- and nano-link ultra-low power heaters for sensors

AU - Groenland, A.W.

AU - Vereshchagina, E.

AU - Kovalgin, Alexeij Y.

AU - Wolters, Robertus A.M.

AU - Gardeniers, Johannes G.E.

AU - Schmitz, Jurriaan

N1 - Conference code: 42

PY - 2012/9/17

Y1 - 2012/9/17

N2 - A new microfabricated device for heating and sensing in gases is presented. It is based on the resistive heating of a micro- or nano-metric hollow cylinder of titanium nitride, and measurement of its (temperature-dependent) resistance. This article presents the fabrication and temperature calibration of the device, and illustrates its function as flow meter and thermal conductivity meter. A temperature of 280 ºC is achieved at a power consumption of only 5.5 μW, orders of magnitude less than existing commercial hotplate devices. The thermal time constant can be as low as 60-120 microseconds.

AB - A new microfabricated device for heating and sensing in gases is presented. It is based on the resistive heating of a micro- or nano-metric hollow cylinder of titanium nitride, and measurement of its (temperature-dependent) resistance. This article presents the fabrication and temperature calibration of the device, and illustrates its function as flow meter and thermal conductivity meter. A temperature of 280 ºC is achieved at a power consumption of only 5.5 μW, orders of magnitude less than existing commercial hotplate devices. The thermal time constant can be as low as 60-120 microseconds.

KW - EWI-23023

KW - METIS-296278

KW - IR-90707

U2 - 10.1109/ESSDERC.2012.6343360

DO - 10.1109/ESSDERC.2012.6343360

M3 - Conference contribution

SN - 978-1-4673-1706-1

SP - 169

EP - 172

BT - European Solid-State Device Research Conference, ESSDERC 2012

PB - IEEE

CY - USA

T2 - 42nd European Solid-State Device Research Conference, ESSDERC 2012

Y2 - 17 September 2012 through 21 September 2012

ER -