Micro- and nano-link ultra-low power heaters for sensors

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A new microfabricated device for heating and sensing in gases is presented. It is based on the resistive heating of a micro- or nano-metric hollow cylinder of titanium nitride, and measurement of its (temperature-dependent) resistance. This article presents the fabrication and temperature calibration of the device, and illustrates its function as flow meter and thermal conductivity meter. A temperature of 280 ºC is achieved at a power consumption of only 5.5 μW, orders of magnitude less than existing commercial hotplate devices. The thermal time constant can be as low as 60-120 microseconds.
Original languageUndefined
Title of host publicationEuropean Solid-State Device Research Conference, ESSDERC 2012
Place of PublicationUSA
PublisherIEEE Solid-State Circuits Society
Number of pages4
ISBN (Print)978-1-4673-1706-1
Publication statusPublished - 17 Sep 2012
Event42nd European Solid-State Device Research Conference, ESSDERC 2012 - Bordeaux, France
Duration: 17 Sep 201221 Sep 2012
Conference number: 42

Publication series

PublisherIEEE Solid-State Circuits Society


Conference42nd European Solid-State Device Research Conference, ESSDERC 2012
Abbreviated titleESSDERC


  • EWI-23023
  • METIS-296278
  • IR-90707

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