Abstract
This paper presents the realization of micrometer sized
silicon nitride tetrahedra with well-defined angles that are
folded out of a planar geometry using capillary forces. The
required specific three-dimensional shape is achieved by a
well-defined folding sequence. Using the favorable
properties of the recently developed corner lithography
technique, a programmable stop hinge is micro-machined by
etching specifically defined intersection planes of the silicon mold. Tetrahedra were successfully folded by capillarity validating this new technique. The demand for such a microstructure has become very large since it can form the essential basic element for future three-dimensional data storage systems.
Original language | Undefined |
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Title of host publication | 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 |
Place of Publication | USA |
Publisher | IEEE |
Pages | 288-291 |
Number of pages | 4 |
ISBN (Print) | 978-1-4244-9633-4 |
DOIs | |
Publication status | Published - 23 Jan 2011 |
Event | 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: 23 Jan 2011 → 27 Jan 2011 Conference number: 24 |
Publication series
Name | |
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Publisher | IEEE Robotics & Automation and IEEE Sensors Council |
Conference
Conference | 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 |
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Abbreviated title | MEMS |
Country/Territory | Mexico |
City | Cancun |
Period | 23/01/11 → 27/01/11 |
Keywords
- METIS-277584
- IR-76509
- TST-SMI: Formerly in EWI-SMI
- TST-Self Assembly
- EWI-19820