Micro-assembly of three dimensional tetrahedra by capillary forces

J.W. van Honschoten, A.B.H. Legrain, A. Legrain, Johan W. Berenschot, Leon Abelmann, Niels Roelof Tas

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Abstract

This paper presents the realization of micrometer sized silicon nitride tetrahedra with well-defined angles that are folded out of a planar geometry using capillary forces. The required specific three-dimensional shape is achieved by a well-defined folding sequence. Using the favorable properties of the recently developed corner lithography technique, a programmable stop hinge is micro-machined by etching specifically defined intersection planes of the silicon mold. Tetrahedra were successfully folded by capillarity validating this new technique. The demand for such a microstructure has become very large since it can form the essential basic element for future three-dimensional data storage systems.
Original languageUndefined
Title of host publication24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Place of PublicationUSA
PublisherIEEE ROBOTICS AND AUTOMATION SOCIETY
Pages288-291
Number of pages4
ISBN (Print)978-1-4244-9633-4
DOIs
Publication statusPublished - 23 Jan 2011
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: 23 Jan 201127 Jan 2011
Conference number: 24

Publication series

Name
PublisherIEEE Robotics & Automation and IEEE Sensors Council

Conference

Conference24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Abbreviated titleMEMS
CountryMexico
CityCancun
Period23/01/1127/01/11

Keywords

  • METIS-277584
  • IR-76509
  • TST-SMI: Formerly in EWI-SMI
  • TST-Self Assembly
  • EWI-19820

Cite this

van Honschoten, J. W., Legrain, A. B. H., Legrain, A., Berenschot, J. W., Abelmann, L., & Tas, N. R. (2011). Micro-assembly of three dimensional tetrahedra by capillary forces. In 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 288-291). USA: IEEE ROBOTICS AND AUTOMATION SOCIETY. https://doi.org/10.1109/MEMSYS.2011.5734418
van Honschoten, J.W. ; Legrain, A.B.H. ; Legrain, A. ; Berenschot, Johan W. ; Abelmann, Leon ; Tas, Niels Roelof. / Micro-assembly of three dimensional tetrahedra by capillary forces. 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. USA : IEEE ROBOTICS AND AUTOMATION SOCIETY, 2011. pp. 288-291
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abstract = "This paper presents the realization of micrometer sized silicon nitride tetrahedra with well-defined angles that are folded out of a planar geometry using capillary forces. The required specific three-dimensional shape is achieved by a well-defined folding sequence. Using the favorable properties of the recently developed corner lithography technique, a programmable stop hinge is micro-machined by etching specifically defined intersection planes of the silicon mold. Tetrahedra were successfully folded by capillarity validating this new technique. The demand for such a microstructure has become very large since it can form the essential basic element for future three-dimensional data storage systems.",
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note = "10.1109/MEMSYS.2011.5734418",
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van Honschoten, JW, Legrain, ABH, Legrain, A, Berenschot, JW, Abelmann, L & Tas, NR 2011, Micro-assembly of three dimensional tetrahedra by capillary forces. in 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. IEEE ROBOTICS AND AUTOMATION SOCIETY, USA, pp. 288-291, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 23/01/11. https://doi.org/10.1109/MEMSYS.2011.5734418

Micro-assembly of three dimensional tetrahedra by capillary forces. / van Honschoten, J.W.; Legrain, A.B.H.; Legrain, A.; Berenschot, Johan W.; Abelmann, Leon; Tas, Niels Roelof.

24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. USA : IEEE ROBOTICS AND AUTOMATION SOCIETY, 2011. p. 288-291.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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AU - Legrain, A.B.H.

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AU - Abelmann, Leon

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N2 - This paper presents the realization of micrometer sized silicon nitride tetrahedra with well-defined angles that are folded out of a planar geometry using capillary forces. The required specific three-dimensional shape is achieved by a well-defined folding sequence. Using the favorable properties of the recently developed corner lithography technique, a programmable stop hinge is micro-machined by etching specifically defined intersection planes of the silicon mold. Tetrahedra were successfully folded by capillarity validating this new technique. The demand for such a microstructure has become very large since it can form the essential basic element for future three-dimensional data storage systems.

AB - This paper presents the realization of micrometer sized silicon nitride tetrahedra with well-defined angles that are folded out of a planar geometry using capillary forces. The required specific three-dimensional shape is achieved by a well-defined folding sequence. Using the favorable properties of the recently developed corner lithography technique, a programmable stop hinge is micro-machined by etching specifically defined intersection planes of the silicon mold. Tetrahedra were successfully folded by capillarity validating this new technique. The demand for such a microstructure has become very large since it can form the essential basic element for future three-dimensional data storage systems.

KW - METIS-277584

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KW - TST-SMI: Formerly in EWI-SMI

KW - TST-Self Assembly

KW - EWI-19820

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van Honschoten JW, Legrain ABH, Legrain A, Berenschot JW, Abelmann L, Tas NR. Micro-assembly of three dimensional tetrahedra by capillary forces. In 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY. 2011. p. 288-291 https://doi.org/10.1109/MEMSYS.2011.5734418