Micro-assembly of three dimensional tetrahedra by capillary forces

J.W. van Honschoten, A.B.H. Legrain, A. Legrain, Johan W. Berenschot, Leon Abelmann, Niels Roelof Tas

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    4 Citations (Scopus)

    Abstract

    This paper presents the realization of micrometer sized silicon nitride tetrahedra with well-defined angles that are folded out of a planar geometry using capillary forces. The required specific three-dimensional shape is achieved by a well-defined folding sequence. Using the favorable properties of the recently developed corner lithography technique, a programmable stop hinge is micro-machined by etching specifically defined intersection planes of the silicon mold. Tetrahedra were successfully folded by capillarity validating this new technique. The demand for such a microstructure has become very large since it can form the essential basic element for future three-dimensional data storage systems.
    Original languageUndefined
    Title of host publication24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
    Place of PublicationUSA
    PublisherIEEE ROBOTICS AND AUTOMATION SOCIETY
    Pages288-291
    Number of pages4
    ISBN (Print)978-1-4244-9633-4
    DOIs
    Publication statusPublished - 23 Jan 2011
    Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
    Duration: 23 Jan 201127 Jan 2011
    Conference number: 24

    Publication series

    Name
    PublisherIEEE Robotics & Automation and IEEE Sensors Council

    Conference

    Conference24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
    Abbreviated titleMEMS
    CountryMexico
    CityCancun
    Period23/01/1127/01/11

    Keywords

    • METIS-277584
    • IR-76509
    • TST-SMI: Formerly in EWI-SMI
    • TST-Self Assembly
    • EWI-19820

    Cite this

    van Honschoten, J. W., Legrain, A. B. H., Legrain, A., Berenschot, J. W., Abelmann, L., & Tas, N. R. (2011). Micro-assembly of three dimensional tetrahedra by capillary forces. In 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 288-291). USA: IEEE ROBOTICS AND AUTOMATION SOCIETY. https://doi.org/10.1109/MEMSYS.2011.5734418
    van Honschoten, J.W. ; Legrain, A.B.H. ; Legrain, A. ; Berenschot, Johan W. ; Abelmann, Leon ; Tas, Niels Roelof. / Micro-assembly of three dimensional tetrahedra by capillary forces. 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. USA : IEEE ROBOTICS AND AUTOMATION SOCIETY, 2011. pp. 288-291
    @inproceedings{d6eed17938944f5cbe3b994e57200735,
    title = "Micro-assembly of three dimensional tetrahedra by capillary forces",
    abstract = "This paper presents the realization of micrometer sized silicon nitride tetrahedra with well-defined angles that are folded out of a planar geometry using capillary forces. The required specific three-dimensional shape is achieved by a well-defined folding sequence. Using the favorable properties of the recently developed corner lithography technique, a programmable stop hinge is micro-machined by etching specifically defined intersection planes of the silicon mold. Tetrahedra were successfully folded by capillarity validating this new technique. The demand for such a microstructure has become very large since it can form the essential basic element for future three-dimensional data storage systems.",
    keywords = "METIS-277584, IR-76509, TST-SMI: Formerly in EWI-SMI, TST-Self Assembly, EWI-19820",
    author = "{van Honschoten}, J.W. and A.B.H. Legrain and A. Legrain and Berenschot, {Johan W.} and Leon Abelmann and Tas, {Niels Roelof}",
    note = "10.1109/MEMSYS.2011.5734418",
    year = "2011",
    month = "1",
    day = "23",
    doi = "10.1109/MEMSYS.2011.5734418",
    language = "Undefined",
    isbn = "978-1-4244-9633-4",
    publisher = "IEEE ROBOTICS AND AUTOMATION SOCIETY",
    pages = "288--291",
    booktitle = "24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011",

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    van Honschoten, JW, Legrain, ABH, Legrain, A, Berenschot, JW, Abelmann, L & Tas, NR 2011, Micro-assembly of three dimensional tetrahedra by capillary forces. in 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. IEEE ROBOTICS AND AUTOMATION SOCIETY, USA, pp. 288-291, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 23/01/11. https://doi.org/10.1109/MEMSYS.2011.5734418

    Micro-assembly of three dimensional tetrahedra by capillary forces. / van Honschoten, J.W.; Legrain, A.B.H.; Legrain, A.; Berenschot, Johan W.; Abelmann, Leon; Tas, Niels Roelof.

    24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. USA : IEEE ROBOTICS AND AUTOMATION SOCIETY, 2011. p. 288-291.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    T1 - Micro-assembly of three dimensional tetrahedra by capillary forces

    AU - van Honschoten, J.W.

    AU - Legrain, A.B.H.

    AU - Legrain, A.

    AU - Berenschot, Johan W.

    AU - Abelmann, Leon

    AU - Tas, Niels Roelof

    N1 - 10.1109/MEMSYS.2011.5734418

    PY - 2011/1/23

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    N2 - This paper presents the realization of micrometer sized silicon nitride tetrahedra with well-defined angles that are folded out of a planar geometry using capillary forces. The required specific three-dimensional shape is achieved by a well-defined folding sequence. Using the favorable properties of the recently developed corner lithography technique, a programmable stop hinge is micro-machined by etching specifically defined intersection planes of the silicon mold. Tetrahedra were successfully folded by capillarity validating this new technique. The demand for such a microstructure has become very large since it can form the essential basic element for future three-dimensional data storage systems.

    AB - This paper presents the realization of micrometer sized silicon nitride tetrahedra with well-defined angles that are folded out of a planar geometry using capillary forces. The required specific three-dimensional shape is achieved by a well-defined folding sequence. Using the favorable properties of the recently developed corner lithography technique, a programmable stop hinge is micro-machined by etching specifically defined intersection planes of the silicon mold. Tetrahedra were successfully folded by capillarity validating this new technique. The demand for such a microstructure has become very large since it can form the essential basic element for future three-dimensional data storage systems.

    KW - METIS-277584

    KW - IR-76509

    KW - TST-SMI: Formerly in EWI-SMI

    KW - TST-Self Assembly

    KW - EWI-19820

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    van Honschoten JW, Legrain ABH, Legrain A, Berenschot JW, Abelmann L, Tas NR. Micro-assembly of three dimensional tetrahedra by capillary forces. In 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY. 2011. p. 288-291 https://doi.org/10.1109/MEMSYS.2011.5734418