Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning

S.M. Chakkalakkal Abdulla, L.J. Kauppinen, Mindert Dijkstra, Meint J. de Boer, Johan W. Berenschot, R.M. de Ridder, Gijsbertus J.M. Krijnen

    Research output: Contribution to journalArticleAcademicpeer-review

    5 Citations (Scopus)

    Abstract

    This paper presents the fabrication technology for a novel class of photonic devices which integrates silicon 2D photonic crystal (PhC) waveguides and electrostatically actuated microelectromechanical systems. Bimorph cantilevers equipped with tips that are self-aligned relative to the holes of the PhC modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated by surface micromachining techniques. Preliminary experiments with these devices have shown 80% throughput modulation using a square-wave drive signal of 0–8 V at 1 kHz.
    Original languageUndefined
    Pages (from-to)125010
    Number of pages10
    JournalJournal of micromechanics and microengineering
    Volume21
    Issue number12
    DOIs
    Publication statusPublished - Dec 2011

    Keywords

    • TST-ACTUATORS
    • IR-78446
    • METIS-279691
    • EWI-20781

    Cite this

    @article{446ed5a34122486caa2d6f395205e77d,
    title = "Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning",
    abstract = "This paper presents the fabrication technology for a novel class of photonic devices which integrates silicon 2D photonic crystal (PhC) waveguides and electrostatically actuated microelectromechanical systems. Bimorph cantilevers equipped with tips that are self-aligned relative to the holes of the PhC modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated by surface micromachining techniques. Preliminary experiments with these devices have shown 80{\%} throughput modulation using a square-wave drive signal of 0–8 V at 1 kHz.",
    keywords = "TST-ACTUATORS, IR-78446, METIS-279691, EWI-20781",
    author = "{Chakkalakkal Abdulla}, S.M. and L.J. Kauppinen and Mindert Dijkstra and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and {de Ridder}, R.M. and Krijnen, {Gijsbertus J.M.}",
    note = "10.1088/0960-1317/21/12/125010",
    year = "2011",
    month = "12",
    doi = "10.1088/0960-1317/21/12/125010",
    language = "Undefined",
    volume = "21",
    pages = "125010",
    journal = "Journal of micromechanics and microengineering",
    issn = "0960-1317",
    publisher = "IOP Publishing Ltd.",
    number = "12",

    }

    Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning. / Chakkalakkal Abdulla, S.M.; Kauppinen, L.J.; Dijkstra, Mindert; de Boer, Meint J.; Berenschot, Johan W.; de Ridder, R.M.; Krijnen, Gijsbertus J.M.

    In: Journal of micromechanics and microengineering, Vol. 21, No. 12, 12.2011, p. 125010.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning

    AU - Chakkalakkal Abdulla, S.M.

    AU - Kauppinen, L.J.

    AU - Dijkstra, Mindert

    AU - de Boer, Meint J.

    AU - Berenschot, Johan W.

    AU - de Ridder, R.M.

    AU - Krijnen, Gijsbertus J.M.

    N1 - 10.1088/0960-1317/21/12/125010

    PY - 2011/12

    Y1 - 2011/12

    N2 - This paper presents the fabrication technology for a novel class of photonic devices which integrates silicon 2D photonic crystal (PhC) waveguides and electrostatically actuated microelectromechanical systems. Bimorph cantilevers equipped with tips that are self-aligned relative to the holes of the PhC modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated by surface micromachining techniques. Preliminary experiments with these devices have shown 80% throughput modulation using a square-wave drive signal of 0–8 V at 1 kHz.

    AB - This paper presents the fabrication technology for a novel class of photonic devices which integrates silicon 2D photonic crystal (PhC) waveguides and electrostatically actuated microelectromechanical systems. Bimorph cantilevers equipped with tips that are self-aligned relative to the holes of the PhC modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated by surface micromachining techniques. Preliminary experiments with these devices have shown 80% throughput modulation using a square-wave drive signal of 0–8 V at 1 kHz.

    KW - TST-ACTUATORS

    KW - IR-78446

    KW - METIS-279691

    KW - EWI-20781

    U2 - 10.1088/0960-1317/21/12/125010

    DO - 10.1088/0960-1317/21/12/125010

    M3 - Article

    VL - 21

    SP - 125010

    JO - Journal of micromechanics and microengineering

    JF - Journal of micromechanics and microengineering

    SN - 0960-1317

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    ER -