Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning

S.M. Chakkalakkal Abdulla, L.J. Kauppinen, Mindert Dijkstra, Meint J. de Boer, Johan W. Berenschot, R.M. de Ridder, Gijsbertus J.M. Krijnen

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    5 Citations (Scopus)

    Abstract

    This paper presents the fabrication technology for a novel class of photonic devices which integrates silicon 2D photonic crystal (PhC) waveguides and electrostatically actuated microelectromechanical systems. Bimorph cantilevers equipped with tips that are self-aligned relative to the holes of the PhC modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated by surface micromachining techniques. Preliminary experiments with these devices have shown 80% throughput modulation using a square-wave drive signal of 0–8 V at 1 kHz.
    Original languageUndefined
    Pages (from-to)125010
    Number of pages10
    JournalJournal of micromechanics and microengineering
    Volume21
    Issue number12
    DOIs
    Publication statusPublished - Dec 2011

    Keywords

    • TST-ACTUATORS
    • IR-78446
    • METIS-279691
    • EWI-20781

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