Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning

S.M. Chakkalakkal Abdulla; L.J. Kauppinen; Mindert Dijkstra; Meint J. de Boer; Johan W. Berenschot; R.M. de Ridder; Gijsbertus J.M. Krijnen

doi:10.1088/0960-1317/21/12/125010

Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning

S.M. Chakkalakkal Abdulla, L.J. Kauppinen, Mindert Dijkstra, Meint J. de Boer, Johan W. Berenschot, R.M. de Ridder, Gijsbertus J.M. Krijnen

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Abstract

This paper presents the fabrication technology for a novel class of photonic devices which integrates silicon 2D photonic crystal (PhC) waveguides and electrostatically actuated microelectromechanical systems. Bimorph cantilevers equipped with tips that are self-aligned relative to the holes of the PhC modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated by surface micromachining techniques. Preliminary experiments with these devices have shown 80% throughput modulation using a square-wave drive signal of 0–8 V at 1 kHz.

Original language	English
Pages (from-to)	125010
Number of pages	10
Journal	Journal of micromechanics and microengineering
Volume	21
Issue number	12
DOIs	https://doi.org/10.1088/0960-1317/21/12/125010
Publication status	Published - Dec 2011

Keywords

TST-ACTUATORS

UN SDGs

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10.1088/0960-1317/21/12/125010

Cite this

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title = "Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning",

abstract = "This paper presents the fabrication technology for a novel class of photonic devices which integrates silicon 2D photonic crystal (PhC) waveguides and electrostatically actuated microelectromechanical systems. Bimorph cantilevers equipped with tips that are self-aligned relative to the holes of the PhC modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated by surface micromachining techniques. Preliminary experiments with these devices have shown 80% throughput modulation using a square-wave drive signal of 0–8 V at 1 kHz.",

keywords = "TST-ACTUATORS",

author = "{Chakkalakkal Abdulla}, S.M. and L.J. Kauppinen and Mindert Dijkstra and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and {de Ridder}, R.M. and Krijnen, {Gijsbertus J.M.}",

year = "2011",

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doi = "10.1088/0960-1317/21/12/125010",

language = "English",

volume = "21",

pages = "125010",

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TY - JOUR

T1 - Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning

AU - Chakkalakkal Abdulla, S.M.

AU - Kauppinen, L.J.

AU - Dijkstra, Mindert

AU - de Boer, Meint J.

AU - Berenschot, Johan W.

AU - de Ridder, R.M.

AU - Krijnen, Gijsbertus J.M.

PY - 2011/12

Y1 - 2011/12

N2 - This paper presents the fabrication technology for a novel class of photonic devices which integrates silicon 2D photonic crystal (PhC) waveguides and electrostatically actuated microelectromechanical systems. Bimorph cantilevers equipped with tips that are self-aligned relative to the holes of the PhC modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated by surface micromachining techniques. Preliminary experiments with these devices have shown 80% throughput modulation using a square-wave drive signal of 0–8 V at 1 kHz.

AB - This paper presents the fabrication technology for a novel class of photonic devices which integrates silicon 2D photonic crystal (PhC) waveguides and electrostatically actuated microelectromechanical systems. Bimorph cantilevers equipped with tips that are self-aligned relative to the holes of the PhC modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated by surface micromachining techniques. Preliminary experiments with these devices have shown 80% throughput modulation using a square-wave drive signal of 0–8 V at 1 kHz.

KW - TST-ACTUATORS

U2 - 10.1088/0960-1317/21/12/125010

DO - 10.1088/0960-1317/21/12/125010

M3 - Article

SN - 0960-1317

VL - 21

SP - 125010

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

IS - 12

ER -

Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning

Abstract

Keywords

UN SDGs

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