This paper presents the fabrication technology for a novel class of photonic devices which integrates silicon 2D photonic crystal (PhC) waveguides and electrostatically actuated microelectromechanical systems. Bimorph cantilevers equipped with tips that are self-aligned relative to the holes of the PhC modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated by surface micromachining techniques. Preliminary experiments with these devices have shown 80% throughput modulation using a square-wave drive signal of 0–8 V at 1 kHz.
Chakkalakkal Abdulla, S. M., Kauppinen, L. J., Dijkstra, M., de Boer, M. J., Berenschot, J. W., de Ridder, R. M., & Krijnen, G. J. M. (2011). Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning. Journal of micromechanics and microengineering, 21(12), 125010. https://doi.org/10.1088/0960-1317/21/12/125010