Abstract
We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigated using both finite-element simulations and experimental methods. Several imaging experiments are presented to illustrate the efficacy and versatility of these cantilevers.
Original language | Undefined |
---|---|
Pages (from-to) | 096107 |
Number of pages | 3 |
Journal | Review of scientific instruments |
Volume | 83 |
Issue number | 9 |
DOIs | |
Publication status | Published - 28 Sept 2012 |
Keywords
- TST-Stobots: Storage Robots
- TST-uSPAM: micro Scanning Probe Array Memory
- IR-82497
- EWI-22640
- METIS-293225
- TST-SMI: Formerly in EWI-SMI