We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigated using both finite-element simulations and experimental methods. Several imaging experiments are presented to illustrate the efficacy and versatility of these cantilevers.
- TST-Stobots: Storage Robots
- TST-uSPAM: micro Scanning Probe Array Memory
- TST-SMI: Formerly in EWI-SMI
Sebastian, A., Shamsudhin, N., Rothuizen, H., Drechsler, U., Koelmans, W. W., Bhaskaran, H., ... Despont, M. (2012). Micro-cantilevers with AIN actuators and PtSi tips for multi-frequency atomic force microscopy. Review of scientific instruments, 83(9), 096107. https://doi.org/10.1063/1.4755749