Micro-cantilevers with AIN actuators and PtSi tips for multi-frequency atomic force microscopy

A. Sebastian; N. Shamsudhin; H. Rothuizen; U. Drechsler; W.W. Koelmans; H. Bhaskaran; H.J. Quenzer; B. Wagner; M. Despont

doi:10.1063/1.4755749

Micro-cantilevers with AIN actuators and PtSi tips for multi-frequency atomic force microscopy

A. Sebastian, N. Shamsudhin, H. Rothuizen, U. Drechsler, W.W. Koelmans, H. Bhaskaran, H.J. Quenzer, B. Wagner, M. Despont

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigated using both finite-element simulations and experimental methods. Several imaging experiments are presented to illustrate the efficacy and versatility of these cantilevers.

Original language	Undefined
Pages (from-to)	096107
Number of pages	3
Journal	Review of scientific instruments
Volume	83
Issue number	9
DOIs	https://doi.org/10.1063/1.4755749
Publication status	Published - 28 Sept 2012

Keywords

TST-Stobots: Storage Robots
TST-uSPAM: micro Scanning Probe Array Memory
IR-82497
EWI-22640
METIS-293225
TST-SMI: Formerly in EWI-SMI

Access to Document

10.1063/1.4755749

http://eprints.eemcs.utwente.nl/secure2/22640/01/koelmans2.pdf

Cite this

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title = "Micro-cantilevers with AIN actuators and PtSi tips for multi-frequency atomic force microscopy",

abstract = "We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigated using both finite-element simulations and experimental methods. Several imaging experiments are presented to illustrate the efficacy and versatility of these cantilevers.",

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T1 - Micro-cantilevers with AIN actuators and PtSi tips for multi-frequency atomic force microscopy

AU - Sebastian, A.

AU - Shamsudhin, N.

AU - Rothuizen, H.

AU - Drechsler, U.

AU - Koelmans, W.W.

AU - Bhaskaran, H.

AU - Quenzer, H.J.

AU - Wagner, B.

AU - Despont, M.

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PY - 2012/9/28

Y1 - 2012/9/28

N2 - We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigated using both finite-element simulations and experimental methods. Several imaging experiments are presented to illustrate the efficacy and versatility of these cantilevers.

AB - We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigated using both finite-element simulations and experimental methods. Several imaging experiments are presented to illustrate the efficacy and versatility of these cantilevers.

KW - TST-Stobots: Storage Robots

KW - TST-uSPAM: micro Scanning Probe Array Memory

KW - IR-82497

KW - EWI-22640

KW - METIS-293225

KW - TST-SMI: Formerly in EWI-SMI

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DO - 10.1063/1.4755749

M3 - Article

SN - 0034-6748

VL - 83

SP - 096107

JO - Review of scientific instruments

JF - Review of scientific instruments

IS - 9

ER -