Micro-cantilevers with AIN actuators and PtSi tips for multi-frequency atomic force microscopy

A. Sebastian, N. Shamsudhin, H. Rothuizen, U. Drechsler, W.W. Koelmans, H. Bhaskaran, H.J. Quenzer, B. Wagner, M. Despont

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    We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigated using both finite-element simulations and experimental methods. Several imaging experiments are presented to illustrate the efficacy and versatility of these cantilevers.
    Original languageUndefined
    Pages (from-to)096107
    Number of pages3
    JournalReview of scientific instruments
    Issue number9
    Publication statusPublished - 28 Sept 2012


    • TST-Stobots: Storage Robots
    • TST-uSPAM: micro Scanning Probe Array Memory
    • IR-82497
    • EWI-22640
    • METIS-293225
    • TST-SMI: Formerly in EWI-SMI

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