Abstract
In this paper we report on gas density measurements using a micro Coriolis sensor. The technology to fabricate the sensor is based on surface channel technology.
The measurement tube is freely suspended and has a wall thickness of only 1 micron. This renders the sensor extremely sensitive to changes in medium mass and therefore density.
The average stability of the density measurement is 0.01 kg/m3. Temperature dependency is 0.02 kg/m3/°C. Pressure dependency is approximately 2 kg/m3/bar. Accuracy of several common gases is on average better than 0.2 kg/m3.
The measurement tube is freely suspended and has a wall thickness of only 1 micron. This renders the sensor extremely sensitive to changes in medium mass and therefore density.
The average stability of the density measurement is 0.01 kg/m3. Temperature dependency is 0.02 kg/m3/°C. Pressure dependency is approximately 2 kg/m3/bar. Accuracy of several common gases is on average better than 0.2 kg/m3.
| Original language | English |
|---|---|
| Pages | 24-27 |
| Number of pages | 4 |
| Publication status | Published - 4 Oct 2017 |
| Event | 3rd Conference on MicroFluidic Handling Systems, MFHS 2017 - De Kleine Willem, Enschede, Netherlands Duration: 4 Oct 2017 → 6 Oct 2017 Conference number: 3 http://mfhs2017.org |
Conference
| Conference | 3rd Conference on MicroFluidic Handling Systems, MFHS 2017 |
|---|---|
| Abbreviated title | MFHS |
| Country/Territory | Netherlands |
| City | Enschede |
| Period | 4/10/17 → 6/10/17 |
| Internet address |