Micro Coriolis Gas Density Sensor

Wouter Sparreboom, Gijs Ratering, Wim Kruijswijk, E.J. van der Wouden, Jarno Groenesteijn, Joost Conrad Lötters

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    Abstract

    In this paper we report on gas density measurements using a micro Coriolis sensor. The technology to fabricate the sensor is based on surface channel technology.
    The measurement tube is freely suspended and has a wall thickness of only 1 micron. This renders the sensor extremely sensitive to changes in medium mass and therefore density.
    The average stability of the density measurement is 0.01 kg/m3. Temperature dependency is 0.02 kg/m3/°C. Pressure dependency is approximately 2 kg/m3/bar. Accuracy of several common gases is on average better than 0.2 kg/m3.
    Original languageEnglish
    Pages24-27
    Number of pages4
    Publication statusPublished - 4 Oct 2017
    Event3rd Conference on MicroFluidic Handling Systems, MFHS 2017 - De Kleine Willem, Enschede, Netherlands
    Duration: 4 Oct 20176 Oct 2017
    Conference number: 3
    http://mfhs2017.org

    Conference

    Conference3rd Conference on MicroFluidic Handling Systems, MFHS 2017
    Abbreviated titleMFHS
    CountryNetherlands
    CityEnschede
    Period4/10/176/10/17
    Internet address

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    Cite this

    Sparreboom, W., Ratering, G., Kruijswijk, W., van der Wouden, E. J., Groenesteijn, J., & Lötters, J. C. (2017). Micro Coriolis Gas Density Sensor. 24-27. Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands.