Micro Coriolis Gas Density Sensor

W. Sparreboom; G. Ratering; W. Kruijswijk; E.J. van der Wouden; J. Groenesteijn; J.C. Lötters

Micro Coriolis Gas Density Sensor

W. Sparreboom
, G. Ratering
, W. Kruijswijk
, E.J. van der Wouden
, J. Groenesteijn
, J.C. Lötters

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Abstract

In this paper we report on gas density measurements using a micro Coriolis sensor. The technology to fabricate the sensor is based on surface channel technology.
The measurement tube is freely suspended and has a wall thickness of only 1 micron. This renders the sensor extremely sensitive to changes in medium mass and therefore density.
The average stability of the density measurement is 0.01 kg/m3. Temperature dependency is 0.02 kg/m3/°C. Pressure dependency is approximately 2 kg/m3/bar. Accuracy of several common gases is on average better than 0.2 kg/m3.

Original language	English
Pages	24-27
Number of pages	4
Publication status	Published - 4 Oct 2017
Event	3rd Conference on MicroFluidic Handling Systems, MFHS 2017 - De Kleine Willem, Enschede, Netherlands Duration: 4 Oct 2017 → 6 Oct 2017 Conference number: 3 http://mfhs2017.org

Conference

Conference	3rd Conference on MicroFluidic Handling Systems, MFHS 2017
Abbreviated title	MFHS
Country/Territory	Netherlands
City	Enschede
Period	4/10/17 → 6/10/17
Internet address	http://mfhs2017.org

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title = "Micro Coriolis Gas Density Sensor",

abstract = "In this paper we report on gas density measurements using a micro Coriolis sensor. The technology to fabricate the sensor is based on surface channel technology. The measurement tube is freely suspended and has a wall thickness of only 1 micron. This renders the sensor extremely sensitive to changes in medium mass and therefore density. The average stability of the density measurement is 0.01 kg/m3. Temperature dependency is 0.02 kg/m3/°C. Pressure dependency is approximately 2 kg/m3/bar. Accuracy of several common gases is on average better than 0.2 kg/m3.",

author = "W. Sparreboom and G. Ratering and W. Kruijswijk and \{van der Wouden\}, E.J. and J. Groenesteijn and J.C. L{\"o}tters",

year = "2017",

month = oct,

day = "4",

language = "English",

pages = "24--27",

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TY - CONF

T1 - Micro Coriolis Gas Density Sensor

AU - Sparreboom, W.

AU - Ratering, G.

AU - Kruijswijk, W.

AU - van der Wouden, E.J.

AU - Groenesteijn, J.

AU - Lötters, J.C.

N1 - Conference code: 3

PY - 2017/10/4

Y1 - 2017/10/4

N2 - In this paper we report on gas density measurements using a micro Coriolis sensor. The technology to fabricate the sensor is based on surface channel technology. The measurement tube is freely suspended and has a wall thickness of only 1 micron. This renders the sensor extremely sensitive to changes in medium mass and therefore density. The average stability of the density measurement is 0.01 kg/m3. Temperature dependency is 0.02 kg/m3/°C. Pressure dependency is approximately 2 kg/m3/bar. Accuracy of several common gases is on average better than 0.2 kg/m3.

AB - In this paper we report on gas density measurements using a micro Coriolis sensor. The technology to fabricate the sensor is based on surface channel technology. The measurement tube is freely suspended and has a wall thickness of only 1 micron. This renders the sensor extremely sensitive to changes in medium mass and therefore density. The average stability of the density measurement is 0.01 kg/m3. Temperature dependency is 0.02 kg/m3/°C. Pressure dependency is approximately 2 kg/m3/bar. Accuracy of several common gases is on average better than 0.2 kg/m3.

M3 - Paper

SP - 24

EP - 27

T2 - 3rd Conference on MicroFluidic Handling Systems, MFHS 2017

Y2 - 4 October 2017 through 6 October 2017

ER -

Micro Coriolis Gas Density Sensor

Abstract

Conference

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