Micro Coriolis mass flow censor with extended range for a monopropellant micro propulsion system

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    We have designed and realised a micromachined micro Coriolis flow sensor for the measurement of hydrazine (N2H4, High Purity Grade) propellant flow in micro chemical propulsion systems. The sensor should be able to measure mass flow up to 6 mg/s for a single thruster or up to 24 mg/s for four thrusters. The sensor will first be used for measurement and characterisation of the micro thruster system in a simulated space vacuum environment. Integration of the sensor chip within the micro thruster flight hardware will be considered at a later stage. The new chip has an increased flow range because of an integrated on-chip bypass channel. First measurement results have demonstrated an increase in flow range which corresponds well to the designed bypass ratio.
    Original languageUndefined
    Title of host publicationProceedings of Sensor 2013
    Place of PublicationWunstorf, Germany
    PublisherAMA Services GmbH
    Number of pages5
    ISBN (Print)978-3-9813484-3-9
    Publication statusPublished - 14 May 2013
    EventSensor 2013 - Nürnberg, Germany
    Duration: 14 May 201316 May 2013

    Publication series

    NameProceedings AMA conferences 2013
    PublisherAMA Services GmbH


    ConferenceSensor 2013
    Other14-16 May 2013


    • hydrazine flow measurement
    • EWI-23380
    • Micro Coriolis flow sensor
    • IR-86201
    • MEMS fabrication technology
    • Surface channel technology
    • METIS-297660
    • Micro chemical propulsion system

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