@inproceedings{396a8c416c784461a535010e104acabe,
title = "Micro Coriolis Mass Flow Sensor Based on Electroplated Nickel Tubes",
abstract = "This paper presents a nickel plated Coriolis mass flow sensor that has been tested using water flow. The sensor consists of a free suspended tube which was fabricated by electroplating nickel on a polymer mold. The tube has a total length of 37 mm, a diameter of 280 μm and a wall thickness of 60 μm. The tube is driven into vibration by Lorentz force and the motion of the tube is detected by a laser Doppler vibrometer (LDV), a Polytec MSA-600 microsystem analyzer. The tube has a resistance of 0.1 Ω. The mass flow sensor has been tested with water over a mass flow range of 0-20 g/h and shows a linear response that corresponds well with theory. The sensor results in a pressure drop of approximately 1 bar at the maximum flow rate of 20 g/h.",
keywords = "Coriolis mass flow sensor, cylindrical tube, Nickel electroplated tube, 2024 OA procedure",
author = "M. Yariesbouei and R.G.P. Sanders and R.J. Wiegerink and J.C. Lotters",
note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 IEEE Sensors Conference, SENSORS 2022 ; Conference date: 30-10-2022 Through 02-11-2022",
year = "2022",
doi = "10.1109/SENSORS52175.2022.9967259",
language = "English",
isbn = "978-1-6654-8465-7",
series = "Proceedings of IEEE Sensors",
publisher = "IEEE",
booktitle = "2022 IEEE Sensors, SENSORS 2022 - Conference Proceedings",
address = "United States",
}