We have realized a micro Coriolis mass flow meter driven with an external piezo ceramic. The piezoelec tric ceramic is glued on top of sensor chip with a inertial weight on top of the piezo ceramic. Its ability to measure mass flow is characterized by a laser Doppler vibrometer. Our measurement with water from 0 to 10 ml/h confirms that the sensor response is linear .
|Publication status||Published - 4 Oct 2017|
|Event||3rd Conference on MicroFluidic Handling Systems, MFHS 2017 - De Kleine Willem, Enschede, Netherlands|
Duration: 4 Oct 2017 → 6 Oct 2017
Conference number: 3
|Conference||3rd Conference on MicroFluidic Handling Systems, MFHS 2017|
|Period||4/10/17 → 6/10/17|
- Micro Coriolis mass flow sensor
- Piezoelectric actuator
Zeng, Y., Groenesteijn, J., Alveringh, D., Wiegerink, R. J., & Lötters, J. C. (2017). Micro Coriolis mass flow sensor driven by external piezo ceramic. 45-48. Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands.