Micro Coriolis mass flow sensor driven by external piezo ceramic

Yaxiang  Zeng; Jarno Groenesteijn; Dennis  Alveringh; Remco J. Wiegerink; Joost Conrad Lötters

Micro Coriolis mass flow sensor driven by external piezo ceramic

Yaxiang Zeng, Jarno Groenesteijn, Dennis Alveringh, Remco J. Wiegerink, Joost Conrad Lötters

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Abstract

We have realized a micro Coriolis mass flow meter driven with an external piezo ceramic. The piezoelec tric ceramic is glued on top of sensor chip with a inertial weight on top of the piezo ceramic. Its ability to measure mass flow is characterized by a laser Doppler vibrometer. Our measurement with water from 0 to 10 ml/h confirms that the sensor response is linear .

Original language	English
Pages	45-48
Publication status	Published - 4 Oct 2017
Event	3rd Conference on MicroFluidic Handling Systems, MFHS 2017 - De Kleine Willem, Enschede, Netherlands Duration: 4 Oct 2017 → 6 Oct 2017 Conference number: 3 http://mfhs2017.org

Conference

Conference	3rd Conference on MicroFluidic Handling Systems, MFHS 2017
Abbreviated title	MFHS
Country/Territory	Netherlands
City	Enschede
Period	4/10/17 → 6/10/17
Internet address	http://mfhs2017.org

Keywords

Micro Coriolis mass flow sensor
Piezoelectric actuator

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@conference{a169963d998e46fa8d3bb84b6731b2c6,

title = "Micro Coriolis mass flow sensor driven by external piezo ceramic",

abstract = "We have realized a micro Coriolis mass flow meter driven with an external piezo ceramic. The piezoelec tric ceramic is glued on top of sensor chip with a inertial weight on top of the piezo ceramic. Its ability to measure mass flow is characterized by a laser Doppler vibrometer. Our measurement with water from 0 to 10 ml/h confirms that the sensor response is linear .",

keywords = "Micro Coriolis mass flow sensor, Piezoelectric actuator",

author = "Yaxiang Zeng and Jarno Groenesteijn and Dennis Alveringh and Wiegerink, {Remco J.} and L{\"o}tters, {Joost Conrad}",

year = "2017",

month = oct,

day = "4",

language = "English",

pages = "45--48",

note = "3rd Conference on MicroFluidic Handling Systems, MFHS 2017, MFHS ; Conference date: 04-10-2017 Through 06-10-2017",

url = "http://mfhs2017.org",

}

TY - CONF

T1 - Micro Coriolis mass flow sensor driven by external piezo ceramic

AU - Zeng, Yaxiang

AU - Groenesteijn, Jarno

AU - Alveringh, Dennis

AU - Wiegerink, Remco J.

AU - Lötters, Joost Conrad

N1 - Conference code: 3

PY - 2017/10/4

Y1 - 2017/10/4

N2 - We have realized a micro Coriolis mass flow meter driven with an external piezo ceramic. The piezoelec tric ceramic is glued on top of sensor chip with a inertial weight on top of the piezo ceramic. Its ability to measure mass flow is characterized by a laser Doppler vibrometer. Our measurement with water from 0 to 10 ml/h confirms that the sensor response is linear .

AB - We have realized a micro Coriolis mass flow meter driven with an external piezo ceramic. The piezoelec tric ceramic is glued on top of sensor chip with a inertial weight on top of the piezo ceramic. Its ability to measure mass flow is characterized by a laser Doppler vibrometer. Our measurement with water from 0 to 10 ml/h confirms that the sensor response is linear .

KW - Micro Coriolis mass flow sensor

KW - Piezoelectric actuator

UR - http://mfhs2017.org

UR - https://www.utwente.nl/en/eemcs/mfhs2017/mfhs2017-conference-proceedings.pdf

M3 - Paper

SP - 45

EP - 48

T2 - 3rd Conference on MicroFluidic Handling Systems, MFHS 2017

Y2 - 4 October 2017 through 6 October 2017

ER -

Micro Coriolis mass flow sensor driven by external piezo ceramic

Abstract

Conference

Keywords

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