Micro Coriolis mass flow sensor driven by external piezo ceramic

Yaxiang Zeng, Jarno Groenesteijn, Dennis Alveringh, Remco J. Wiegerink, Joost Conrad Lötters

    Research output: Contribution to conferencePaperAcademicpeer-review

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    Abstract

    We have realized a micro Coriolis mass flow meter driven with an external piezo ceramic. The piezoelec tric ceramic is glued on top of sensor chip with a inertial weight on top of the piezo ceramic. Its ability to measure mass flow is characterized by a laser Doppler vibrometer. Our measurement with water from 0 to 10 ml/h confirms that the sensor response is linear .
    Original languageEnglish
    Pages45-48
    Publication statusPublished - 4 Oct 2017
    Event3rd Conference on MicroFluidic Handling Systems, MFHS 2017 - De Kleine Willem, Enschede, Netherlands
    Duration: 4 Oct 20176 Oct 2017
    Conference number: 3
    http://mfhs2017.org

    Conference

    Conference3rd Conference on MicroFluidic Handling Systems, MFHS 2017
    Abbreviated titleMFHS
    CountryNetherlands
    CityEnschede
    Period4/10/176/10/17
    Internet address

    Fingerprint

    mass flow
    ceramics
    sensors
    vibration meters
    chips
    water
    lasers

    Keywords

    • Micro Coriolis mass flow sensor
    • Piezoelectric actuator

    Cite this

    Zeng, Y., Groenesteijn, J., Alveringh, D., Wiegerink, R. J., & Lötters, J. C. (2017). Micro Coriolis mass flow sensor driven by external piezo ceramic. 45-48. Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands.
    Zeng, Yaxiang ; Groenesteijn, Jarno ; Alveringh, Dennis ; Wiegerink, Remco J. ; Lötters, Joost Conrad. / Micro Coriolis mass flow sensor driven by external piezo ceramic. Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands.
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    abstract = "We have realized a micro Coriolis mass flow meter driven with an external piezo ceramic. The piezoelec tric ceramic is glued on top of sensor chip with a inertial weight on top of the piezo ceramic. Its ability to measure mass flow is characterized by a laser Doppler vibrometer. Our measurement with water from 0 to 10 ml/h confirms that the sensor response is linear .",
    keywords = "Micro Coriolis mass flow sensor, Piezoelectric actuator",
    author = "Yaxiang Zeng and Jarno Groenesteijn and Dennis Alveringh and Wiegerink, {Remco J.} and L{\"o}tters, {Joost Conrad}",
    year = "2017",
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    Zeng, Y, Groenesteijn, J, Alveringh, D, Wiegerink, RJ & Lötters, JC 2017, 'Micro Coriolis mass flow sensor driven by external piezo ceramic' Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands, 4/10/17 - 6/10/17, pp. 45-48.

    Micro Coriolis mass flow sensor driven by external piezo ceramic. / Zeng, Yaxiang ; Groenesteijn, Jarno; Alveringh, Dennis ; Wiegerink, Remco J.; Lötters, Joost Conrad.

    2017. 45-48 Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands.

    Research output: Contribution to conferencePaperAcademicpeer-review

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    AU - Zeng, Yaxiang

    AU - Groenesteijn, Jarno

    AU - Alveringh, Dennis

    AU - Wiegerink, Remco J.

    AU - Lötters, Joost Conrad

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    N2 - We have realized a micro Coriolis mass flow meter driven with an external piezo ceramic. The piezoelec tric ceramic is glued on top of sensor chip with a inertial weight on top of the piezo ceramic. Its ability to measure mass flow is characterized by a laser Doppler vibrometer. Our measurement with water from 0 to 10 ml/h confirms that the sensor response is linear .

    AB - We have realized a micro Coriolis mass flow meter driven with an external piezo ceramic. The piezoelec tric ceramic is glued on top of sensor chip with a inertial weight on top of the piezo ceramic. Its ability to measure mass flow is characterized by a laser Doppler vibrometer. Our measurement with water from 0 to 10 ml/h confirms that the sensor response is linear .

    KW - Micro Coriolis mass flow sensor

    KW - Piezoelectric actuator

    UR - http://mfhs2017.org

    UR - https://www.utwente.nl/en/eemcs/mfhs2017/mfhs2017-conference-proceedings.pdf

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    Zeng Y, Groenesteijn J, Alveringh D, Wiegerink RJ, Lötters JC. Micro Coriolis mass flow sensor driven by external piezo ceramic. 2017. Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands.