Micro Coriolis mass flow sensor driven by external piezo ceramic

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    Abstract

    We have realized a micro Coriolis mass flow meter driven with an external piezo ceramic. The piezoelec tric ceramic is glued on top of sensor chip with a inertial weight on top of the piezo ceramic. Its ability to measure mass flow is characterized by a laser Doppler vibrometer. Our measurement with water from 0 to 10 ml/h confirms that the sensor response is linear .
    Original languageEnglish
    Pages45-48
    Publication statusPublished - 4 Oct 2017
    Event3rd Conference on MicroFluidic Handling Systems, MFHS 2017 - De Kleine Willem, Enschede, Netherlands
    Duration: 4 Oct 20176 Oct 2017
    Conference number: 3
    http://mfhs2017.org

    Conference

    Conference3rd Conference on MicroFluidic Handling Systems, MFHS 2017
    Abbreviated titleMFHS
    CountryNetherlands
    CityEnschede
    Period4/10/176/10/17
    Internet address

    Keywords

    • Micro Coriolis mass flow sensor
    • Piezoelectric actuator

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