Abstract
We have realized a micro Coriolis mass flow sensor that is actuated by integrated lead zirconate titanate (PZT) thin film actuators, allowing low voltage, low power actuation compared to current actuation methods. The integrated PZT thin film actuators are deposited on top of silicon-rich silicon nitride (SiRN) fluidic microchannels by pulsed laser deposition (PLD). In this paper we present the fabrication process and first characterization results, including a mass flow measurement with nitrogen flow using a Polytec MSA-400 laser Doppler vibrometer to detect the Coriolis induced motion of the sensor tube. The measurement results confirm that the sensor output is proportional to mass flow up to 14 mg/min.
Original language | English |
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Title of host publication | 2018 IEEE Micro Electro Mechanical Systems (MEMS) |
ISBN (Electronic) | 978-1-5386-4782-0 |
DOIs | |
Publication status | Published - 21 Jan 2018 |
Event | 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast Waterfront, Belfast, United Kingdom Duration: 21 Jan 2018 → 25 Jan 2018 Conference number: 31 http://www.mems2018.org/ |
Conference
Conference | 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 |
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Abbreviated title | MEMS |
Country/Territory | United Kingdom |
City | Belfast |
Period | 21/01/18 → 25/01/18 |
Internet address |
Keywords
- Micro Coriolis mass flow sensor
- PZT
- thin film actuator