Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

Yaxiang Zeng, Jarno Groenesteijn, Dennis Alveringh, R.J.A. Steenwelle, K. Ma, Remco J. Wiegerink, Joost Conrad Lötters

Research output: Contribution to conferencePaperAcademicpeer-review

1 Citation (Scopus)
104 Downloads (Pure)

Abstract

We have realized a micro Coriolis mass flow sensor that is actuated by integrated lead zirconate titanate (PZT) thin film actuators, allowing low voltage, low power actuation compared to current actuation methods. The integrated PZT thin film actuators are deposited on top of silicon-rich silicon nitride (SiRN) fluidic microchannels by pulsed laser deposition (PLD). In this paper we present the fabrication process and first characterization results, including a mass flow measurement with nitrogen flow using a Polytec MSA-400 laser Doppler vibrometer to detect the Coriolis induced motion of the sensor tube. The measurement results confirm that the sensor output is proportional to mass flow up to 14 mg/min.
Original languageEnglish
Publication statusPublished - 21 Jan 2018
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast Waterfront, Belfast, United Kingdom
Duration: 21 Jan 201825 Jan 2018
Conference number: 31
http://www.mems2018.org/

Conference

Conference31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Abbreviated titleMEMS
CountryUnited Kingdom
CityBelfast
Period21/01/1825/01/18
Internet address

Fingerprint

mass flow
actuators
actuation
sensors
thin films
vibration meters
fluidics
flow measurement
microchannels
silicon nitrides
low voltage
pulsed laser deposition
tubes
nitrogen
fabrication
output
silicon
lasers

Keywords

  • Micro Coriolis mass flow sensor
  • PZT
  • thin film actuator

Cite this

Zeng, Y., Groenesteijn, J., Alveringh, D., Steenwelle, R. J. A., Ma, K., Wiegerink, R. J., & Lötters, J. C. (2018). Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators. Paper presented at 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom.
Zeng, Yaxiang ; Groenesteijn, Jarno ; Alveringh, Dennis ; Steenwelle, R.J.A. ; Ma, K. ; Wiegerink, Remco J. ; Lötters, Joost Conrad. / Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators. Paper presented at 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom.
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abstract = "We have realized a micro Coriolis mass flow sensor that is actuated by integrated lead zirconate titanate (PZT) thin film actuators, allowing low voltage, low power actuation compared to current actuation methods. The integrated PZT thin film actuators are deposited on top of silicon-rich silicon nitride (SiRN) fluidic microchannels by pulsed laser deposition (PLD). In this paper we present the fabrication process and first characterization results, including a mass flow measurement with nitrogen flow using a Polytec MSA-400 laser Doppler vibrometer to detect the Coriolis induced motion of the sensor tube. The measurement results confirm that the sensor output is proportional to mass flow up to 14 mg/min.",
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Zeng, Y, Groenesteijn, J, Alveringh, D, Steenwelle, RJA, Ma, K, Wiegerink, RJ & Lötters, JC 2018, 'Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators' Paper presented at 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 21/01/18 - 25/01/18, .

Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators. / Zeng, Yaxiang ; Groenesteijn, Jarno; Alveringh, Dennis ; Steenwelle, R.J.A.; Ma, K.; Wiegerink, Remco J.; Lötters, Joost Conrad.

2018. Paper presented at 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom.

Research output: Contribution to conferencePaperAcademicpeer-review

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AU - Zeng, Yaxiang

AU - Groenesteijn, Jarno

AU - Alveringh, Dennis

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AU - Ma, K.

AU - Wiegerink, Remco J.

AU - Lötters, Joost Conrad

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N2 - We have realized a micro Coriolis mass flow sensor that is actuated by integrated lead zirconate titanate (PZT) thin film actuators, allowing low voltage, low power actuation compared to current actuation methods. The integrated PZT thin film actuators are deposited on top of silicon-rich silicon nitride (SiRN) fluidic microchannels by pulsed laser deposition (PLD). In this paper we present the fabrication process and first characterization results, including a mass flow measurement with nitrogen flow using a Polytec MSA-400 laser Doppler vibrometer to detect the Coriolis induced motion of the sensor tube. The measurement results confirm that the sensor output is proportional to mass flow up to 14 mg/min.

AB - We have realized a micro Coriolis mass flow sensor that is actuated by integrated lead zirconate titanate (PZT) thin film actuators, allowing low voltage, low power actuation compared to current actuation methods. The integrated PZT thin film actuators are deposited on top of silicon-rich silicon nitride (SiRN) fluidic microchannels by pulsed laser deposition (PLD). In this paper we present the fabrication process and first characterization results, including a mass flow measurement with nitrogen flow using a Polytec MSA-400 laser Doppler vibrometer to detect the Coriolis induced motion of the sensor tube. The measurement results confirm that the sensor output is proportional to mass flow up to 14 mg/min.

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Zeng Y, Groenesteijn J, Alveringh D, Steenwelle RJA, Ma K, Wiegerink RJ et al. Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators. 2018. Paper presented at 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom.