Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

Yaxiang  Zeng; Jarno Groenesteijn; Dennis  Alveringh; R.J.A. Steenwelle; K. Ma; Remco J. Wiegerink; Joost Conrad Lötters

Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

Yaxiang Zeng, Jarno Groenesteijn, Dennis Alveringh, R.J.A. Steenwelle, K. Ma, Remco J. Wiegerink, Joost Conrad Lötters

Inorganic Materials Science

Research output: Contribution to conference › Paper › peer-review

3 Citations (Scopus)

258 Downloads (Pure)

Abstract

We have realized a micro Coriolis mass flow sensor that is actuated by integrated lead zirconate titanate (PZT) thin film actuators, allowing low voltage, low power actuation compared to current actuation methods. The integrated PZT thin film actuators are deposited on top of silicon-rich silicon nitride (SiRN) fluidic microchannels by pulsed laser deposition (PLD). In this paper we present the fabrication process and first characterization results, including a mass flow measurement with nitrogen flow using a Polytec MSA-400 laser Doppler vibrometer to detect the Coriolis induced motion of the sensor tube. The measurement results confirm that the sensor output is proportional to mass flow up to 14 mg/min.

Original language	English
Publication status	Published - 21 Jan 2018
Event	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast Waterfront, Belfast, United Kingdom Duration: 21 Jan 2018 → 25 Jan 2018 Conference number: 31 http://www.mems2018.org/

Conference

Conference	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Abbreviated title	MEMS
Country/Territory	United Kingdom
City	Belfast
Period	21/01/18 → 25/01/18
Internet address	http://www.mems2018.org/

Keywords

Micro Coriolis mass flow sensor
PZT
thin film actuator

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Zeng_MEMS2018_Paper_final

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title = "Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators",

abstract = "We have realized a micro Coriolis mass flow sensor that is actuated by integrated lead zirconate titanate (PZT) thin film actuators, allowing low voltage, low power actuation compared to current actuation methods. The integrated PZT thin film actuators are deposited on top of silicon-rich silicon nitride (SiRN) fluidic microchannels by pulsed laser deposition (PLD). In this paper we present the fabrication process and first characterization results, including a mass flow measurement with nitrogen flow using a Polytec MSA-400 laser Doppler vibrometer to detect the Coriolis induced motion of the sensor tube. The measurement results confirm that the sensor output is proportional to mass flow up to 14 mg/min.",

keywords = "Micro Coriolis mass flow sensor, PZT, thin film actuator",

author = "Yaxiang Zeng and Jarno Groenesteijn and Dennis Alveringh and R.J.A. Steenwelle and K. Ma and Wiegerink, {Remco J.} and L{\"o}tters, {Joost Conrad}",

year = "2018",

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T1 - Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

AU - Zeng, Yaxiang

AU - Groenesteijn, Jarno

AU - Alveringh, Dennis

AU - Steenwelle, R.J.A.

AU - Ma, K.

AU - Wiegerink, Remco J.

AU - Lötters, Joost Conrad

N1 - Conference code: 31

PY - 2018/1/21

Y1 - 2018/1/21

N2 - We have realized a micro Coriolis mass flow sensor that is actuated by integrated lead zirconate titanate (PZT) thin film actuators, allowing low voltage, low power actuation compared to current actuation methods. The integrated PZT thin film actuators are deposited on top of silicon-rich silicon nitride (SiRN) fluidic microchannels by pulsed laser deposition (PLD). In this paper we present the fabrication process and first characterization results, including a mass flow measurement with nitrogen flow using a Polytec MSA-400 laser Doppler vibrometer to detect the Coriolis induced motion of the sensor tube. The measurement results confirm that the sensor output is proportional to mass flow up to 14 mg/min.

AB - We have realized a micro Coriolis mass flow sensor that is actuated by integrated lead zirconate titanate (PZT) thin film actuators, allowing low voltage, low power actuation compared to current actuation methods. The integrated PZT thin film actuators are deposited on top of silicon-rich silicon nitride (SiRN) fluidic microchannels by pulsed laser deposition (PLD). In this paper we present the fabrication process and first characterization results, including a mass flow measurement with nitrogen flow using a Polytec MSA-400 laser Doppler vibrometer to detect the Coriolis induced motion of the sensor tube. The measurement results confirm that the sensor output is proportional to mass flow up to 14 mg/min.

KW - Micro Coriolis mass flow sensor

KW - PZT

KW - thin film actuator

UR - http://www.mems2018.org/program/MEMS2018_FinalProgram.pdf

UR - http://www.scopus.com/inward/record.url?scp=85047014859&partnerID=8YFLogxK

M3 - Paper

T2 - 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018

Y2 - 21 January 2018 through 25 January 2018

ER -

Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

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