Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

Yaxiang Zeng, Jarno Groenesteijn, Dennis Alveringh, R.J.A. Steenwelle, K. Ma, Remco J. Wiegerink, Joost Conrad Lötters

Research output: Contribution to conferencePaper

1 Citation (Scopus)
144 Downloads (Pure)

Abstract

We have realized a micro Coriolis mass flow sensor that is actuated by integrated lead zirconate titanate (PZT) thin film actuators, allowing low voltage, low power actuation compared to current actuation methods. The integrated PZT thin film actuators are deposited on top of silicon-rich silicon nitride (SiRN) fluidic microchannels by pulsed laser deposition (PLD). In this paper we present the fabrication process and first characterization results, including a mass flow measurement with nitrogen flow using a Polytec MSA-400 laser Doppler vibrometer to detect the Coriolis induced motion of the sensor tube. The measurement results confirm that the sensor output is proportional to mass flow up to 14 mg/min.
Original languageEnglish
Publication statusPublished - 21 Jan 2018
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast Waterfront, Belfast, United Kingdom
Duration: 21 Jan 201825 Jan 2018
Conference number: 31
http://www.mems2018.org/

Conference

Conference31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Abbreviated titleMEMS
CountryUnited Kingdom
CityBelfast
Period21/01/1825/01/18
Internet address

Keywords

  • Micro Coriolis mass flow sensor
  • PZT
  • thin film actuator

Fingerprint Dive into the research topics of 'Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators'. Together they form a unique fingerprint.

Cite this