Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

Yaxiang  Zeng; Jarno Groenesteijn; Dennis  Alveringh; R.J.A. Steenwelle; K. Ma; Remco J. Wiegerink; Joost Conrad Lötters

doi:10.1109/MEMSYS.2018.8346689

Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

Yaxiang Zeng, Jarno Groenesteijn, Dennis Alveringh, R.J.A. Steenwelle, K. Ma, Remco J. Wiegerink, Joost Conrad Lötters

Inorganic Materials Science

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

4 Citations (Scopus)

346 Downloads (Pure)

Abstract

We have realized a micro Coriolis mass flow sensor that is actuated by integrated lead zirconate titanate (PZT) thin film actuators, allowing low voltage, low power actuation compared to current actuation methods. The integrated PZT thin film actuators are deposited on top of silicon-rich silicon nitride (SiRN) fluidic microchannels by pulsed laser deposition (PLD). In this paper we present the fabrication process and first characterization results, including a mass flow measurement with nitrogen flow using a Polytec MSA-400 laser Doppler vibrometer to detect the Coriolis induced motion of the sensor tube. The measurement results confirm that the sensor output is proportional to mass flow up to 14 mg/min.

Original language	English
Title of host publication	2018 IEEE Micro Electro Mechanical Systems (MEMS)
ISBN (Electronic)	978-1-5386-4782-0
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346689
Publication status	Published - 21 Jan 2018
Event	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast Waterfront, Belfast, United Kingdom Duration: 21 Jan 2018 → 25 Jan 2018 Conference number: 31 http://www.mems2018.org/

Conference

Conference	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Abbreviated title	MEMS
Country/Territory	United Kingdom
City	Belfast
Period	21/01/18 → 25/01/18
Internet address	http://www.mems2018.org/

Keywords

Micro Coriolis mass flow sensor
PZT
thin film actuator

Access to Document

10.1109/MEMSYS.2018.8346689

Zeng_MEMS2018_Paper_finalAccepted author version, 2.51 MB

Cite this

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title = "Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators",

abstract = "We have realized a micro Coriolis mass flow sensor that is actuated by integrated lead zirconate titanate (PZT) thin film actuators, allowing low voltage, low power actuation compared to current actuation methods. The integrated PZT thin film actuators are deposited on top of silicon-rich silicon nitride (SiRN) fluidic microchannels by pulsed laser deposition (PLD). In this paper we present the fabrication process and first characterization results, including a mass flow measurement with nitrogen flow using a Polytec MSA-400 laser Doppler vibrometer to detect the Coriolis induced motion of the sensor tube. The measurement results confirm that the sensor output is proportional to mass flow up to 14 mg/min.",

keywords = "Micro Coriolis mass flow sensor, PZT, thin film actuator",

author = "Yaxiang Zeng and Jarno Groenesteijn and Dennis Alveringh and R.J.A. Steenwelle and K. Ma and Wiegerink, {Remco J.} and L{\"o}tters, {Joost Conrad}",

year = "2018",

month = jan,

day = "21",

doi = "10.1109/MEMSYS.2018.8346689",

language = "English",

booktitle = "2018 IEEE Micro Electro Mechanical Systems (MEMS)",

note = "31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, MEMS ; Conference date: 21-01-2018 Through 25-01-2018",

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}

Zeng, Y, Groenesteijn, J , Alveringh, D, Steenwelle, RJA, Ma, K , Wiegerink, RJ & Lötters, JC 2018, Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators. in 2018 IEEE Micro Electro Mechanical Systems (MEMS). 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 21/01/18. https://doi.org/10.1109/MEMSYS.2018.8346689

TY - GEN

T1 - Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

AU - Zeng, Yaxiang

AU - Groenesteijn, Jarno

AU - Alveringh, Dennis

AU - Steenwelle, R.J.A.

AU - Ma, K.

AU - Wiegerink, Remco J.

AU - Lötters, Joost Conrad

N1 - Conference code: 31

PY - 2018/1/21

Y1 - 2018/1/21

N2 - We have realized a micro Coriolis mass flow sensor that is actuated by integrated lead zirconate titanate (PZT) thin film actuators, allowing low voltage, low power actuation compared to current actuation methods. The integrated PZT thin film actuators are deposited on top of silicon-rich silicon nitride (SiRN) fluidic microchannels by pulsed laser deposition (PLD). In this paper we present the fabrication process and first characterization results, including a mass flow measurement with nitrogen flow using a Polytec MSA-400 laser Doppler vibrometer to detect the Coriolis induced motion of the sensor tube. The measurement results confirm that the sensor output is proportional to mass flow up to 14 mg/min.

AB - We have realized a micro Coriolis mass flow sensor that is actuated by integrated lead zirconate titanate (PZT) thin film actuators, allowing low voltage, low power actuation compared to current actuation methods. The integrated PZT thin film actuators are deposited on top of silicon-rich silicon nitride (SiRN) fluidic microchannels by pulsed laser deposition (PLD). In this paper we present the fabrication process and first characterization results, including a mass flow measurement with nitrogen flow using a Polytec MSA-400 laser Doppler vibrometer to detect the Coriolis induced motion of the sensor tube. The measurement results confirm that the sensor output is proportional to mass flow up to 14 mg/min.

KW - Micro Coriolis mass flow sensor

KW - PZT

KW - thin film actuator

UR - http://www.mems2018.org/program/MEMS2018_FinalProgram.pdf

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U2 - 10.1109/MEMSYS.2018.8346689

DO - 10.1109/MEMSYS.2018.8346689

M3 - Conference contribution

BT - 2018 IEEE Micro Electro Mechanical Systems (MEMS)

T2 - 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018

Y2 - 21 January 2018 through 25 January 2018

ER -

Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

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Conference

Keywords

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