Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

Yaxiang Zeng, Jarno Groenesteijn, Dennis Alveringh, R.J.A. Steenwelle, K. Ma, Remco J. Wiegerink, Joost Conrad Lötters

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

4 Citations (Scopus)
346 Downloads (Pure)

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