Micro Coriolis mass flow sensor for chemical micropropulsion systems

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    Abstract

    We have designed a micromachined micro Coriolis flow sensor for the measurement of hydrazine (N2H4, High Purity Grade) propellant flow in micro chemical propulsion systems [1]. The sensor measures mass flow up to 6 mg/s for a single thruster or up to 24 mg/s for four thrusters. The sensor will first be used for measurement and characterization of the micro thruster system in a simulated space vacuum environment. Integration of the sensor chip within the micro thruster flight hardware will be considered at a later stage. The new chip has an increased flow range because of an integrated on-chip bypass channel.
    Original languageUndefined
    Title of host publication1st International Conference on Microfluidic Handling Systems, MFHS 2012
    Place of PublicationEnschede
    PublisherUniversiteit Twente
    Pages107-110
    Number of pages4
    ISBN (Print)not assigned
    Publication statusPublished - 10 Oct 2012
    Event1st International Conference on MicroFluidic Handling Systems, MFHS 2012 - Enschede, Netherlands
    Duration: 10 Oct 201212 Oct 2012
    Conference number: 1
    https://www.utwente.nl/en/eemcs/mfhs2012/

    Publication series

    Name
    PublisherUniversiteit Twente

    Conference

    Conference1st International Conference on MicroFluidic Handling Systems, MFHS 2012
    Abbreviated titleMFHS
    CountryNetherlands
    CityEnschede
    Period10/10/1212/10/12
    Internet address

    Keywords

    • EWI-22791
    • IR-84144
    • TST-SENSORS
    • METIS-296191

    Cite this

    Wiegerink, R. J., Lammerink, T. S. J., Groenesteijn, J., Dijkstra, M., & Lötters, J. C. (2012). Micro Coriolis mass flow sensor for chemical micropropulsion systems. In 1st International Conference on Microfluidic Handling Systems, MFHS 2012 (pp. 107-110). Enschede: Universiteit Twente.