Micro coriolis mass flow sensor with integrated capacitive readout

J. Haneveld, Theodorus S.J. Lammerink, Meint J. de Boer, Remco J. Wiegerink

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    18 Citations (Scopus)
    100 Downloads (Pure)

    Abstract

    We have realized a micromachined micro Coriolis mass flow sensor with integrated capacitive readout to detect the extremely small Coriolis vibration of the sensor tube. A special comb-like detection electrode design eliminates the need for multiple metal layers and sacrificial layer etching methods. Using differential readout signals significantly reduces the influence of parasitic capacitances. In addition, the sensing electrodes have been realized on a suspended tube structure which will allow for tuning of the electrode separation by a DC current. First measurements using water, ethanol and white gas indicate that true mass flow is measured by the sensor and that sensor output is linear with mass flow. The measurement error is currently in the order of 2% of the full scale of 1.2 ml/hr for all measured liquids (which corresponds to 1.2 g/hr in the case of water).
    Original languageUndefined
    Title of host publicationIEEE 22nd International Conference on MEMS
    Place of PublicationPiscataway, Inc
    PublisherIEEE
    Pages463-466
    Number of pages4
    ISBN (Print)978-1-4244-2977-6
    DOIs
    Publication statusPublished - Jan 2009
    Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
    Duration: 25 Jan 200929 Jan 2009
    Conference number: 22

    Publication series

    Name
    PublisherInstitute of Electrical and Electronics Engineering, Inc.

    Conference

    Conference22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009
    Abbreviated titleMEMS
    CountryItaly
    CitySorrento
    Period25/01/0929/01/09

    Keywords

    • IR-68938
    • EWI-16928
    • TST-SENSORS
    • METIS-264196

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