Micro Coriolis mass flow sensor with integrated resistive pressure sensors

J. Groenesteijn; D. Alveringh; T.V.P. Schut; R.J. Wiegerink; W. Sparreboom; J.C. Lötters

Micro Coriolis mass flow sensor with integrated resistive pressure sensors

J. Groenesteijn, D. Alveringh, T.V.P. Schut, R.J. Wiegerink, W. Sparreboom, J.C. Lötters

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Abstract

We report on novel resistive pressure sensors, integrated on-chip at the inlet- and outlet-channels of a micro Coriolis mass flow sensor. The pressure sensors can be used to measure the pressure drop over the Coriolis sensor which can be used to compensate pressure-dependent behaviour that might occur and it can be used to calculate the dynamic viscosity of the fluid inside the channels.

Original language	English
Pages	16-19
Number of pages	4
Publication status	Published - 4 Oct 2017
Event	3rd Conference on MicroFluidic Handling Systems, MFHS 2017 - De Kleine Willem, Enschede, Netherlands Duration: 4 Oct 2017 → 6 Oct 2017 Conference number: 3 http://mfhs2017.org

Conference

Conference	3rd Conference on MicroFluidic Handling Systems, MFHS 2017
Abbreviated title	MFHS
Country/Territory	Netherlands
City	Enschede
Period	4/10/17 → 6/10/17
Internet address	http://mfhs2017.org

Keywords

Resistive pressure sensor
Micro Coriolis mass flow sensor
Multiparameter measurement
Viscosity measurement

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title = "Micro Coriolis mass flow sensor with integrated resistive pressure sensors",

abstract = "We report on novel resistive pressure sensors, integrated on-chip at the inlet- and outlet-channels of a micro Coriolis mass flow sensor. The pressure sensors can be used to measure the pressure drop over the Coriolis sensor which can be used to compensate pressure-dependent behaviour that might occur and it can be used to calculate the dynamic viscosity of the fluid inside the channels.",

keywords = "Resistive pressure sensor, Micro Coriolis mass flow sensor, Multiparameter measurement, Viscosity measurement",

author = "J. Groenesteijn and D. Alveringh and T.V.P. Schut and R.J. Wiegerink and W. Sparreboom and J.C. L{\"o}tters",

year = "2017",

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language = "English",

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T1 - Micro Coriolis mass flow sensor with integrated resistive pressure sensors

AU - Groenesteijn, J.

AU - Alveringh, D.

AU - Schut, T.V.P.

AU - Wiegerink, R.J.

AU - Sparreboom, W.

AU - Lötters, J.C.

N1 - Conference code: 3

PY - 2017/10/4

Y1 - 2017/10/4

N2 - We report on novel resistive pressure sensors, integrated on-chip at the inlet- and outlet-channels of a micro Coriolis mass flow sensor. The pressure sensors can be used to measure the pressure drop over the Coriolis sensor which can be used to compensate pressure-dependent behaviour that might occur and it can be used to calculate the dynamic viscosity of the fluid inside the channels.

AB - We report on novel resistive pressure sensors, integrated on-chip at the inlet- and outlet-channels of a micro Coriolis mass flow sensor. The pressure sensors can be used to measure the pressure drop over the Coriolis sensor which can be used to compensate pressure-dependent behaviour that might occur and it can be used to calculate the dynamic viscosity of the fluid inside the channels.

KW - Resistive pressure sensor

KW - Micro Coriolis mass flow sensor

KW - Multiparameter measurement

KW - Viscosity measurement

UR - http://mfhs2017.org

M3 - Paper

SP - 16

EP - 19

T2 - 3rd Conference on MicroFluidic Handling Systems, MFHS 2017

Y2 - 4 October 2017 through 6 October 2017

ER -

Micro Coriolis mass flow sensor with integrated resistive pressure sensors

Abstract

Conference

Keywords

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