Micro Coriolis mass flow sensor with integrated resistive pressure sensors

Jarno Groenesteijn, Dennis Alveringh, Thomas Schut, Remco J. Wiegerink, Wouter Sparreboom, Joost Conrad Lötters

Research output: Contribution to conferencePaperAcademicpeer-review

Abstract

We report on novel resistive pressure sensors, integrated on-chip at the inlet- and outlet-channels of a micro Coriolis mass flow sensor. The pressure sensors can be used to measure the pressure drop over the Coriolis sensor which can be used to compensate pressure-dependent behaviour that might occur and it can be used to calculate the dynamic viscosity of the fluid inside the channels.
Original languageEnglish
Pages16-19
Number of pages4
Publication statusPublished - 4 Oct 2017
Event3rd Conference on MicroFluidic Handling Systems, MFHS 2017 - De Kleine Willem, Enschede, Netherlands
Duration: 4 Oct 20176 Oct 2017
Conference number: 3
http://mfhs2017.org

Conference

Conference3rd Conference on MicroFluidic Handling Systems, MFHS 2017
Abbreviated titleMFHS
CountryNetherlands
CityEnschede
Period4/10/176/10/17
Internet address

Fingerprint

Pressure sensors
Sensors
Pressure drop
Viscosity
Fluids

Keywords

  • Resistive pressure sensor
  • Micro Coriolis mass flow sensor
  • Multiparameter measurement
  • Viscosity measurement

Cite this

Groenesteijn, J., Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W., & Lötters, J. C. (2017). Micro Coriolis mass flow sensor with integrated resistive pressure sensors. 16-19. Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands.
Groenesteijn, Jarno ; Alveringh, Dennis ; Schut, Thomas ; Wiegerink, Remco J. ; Sparreboom, Wouter ; Lötters, Joost Conrad. / Micro Coriolis mass flow sensor with integrated resistive pressure sensors. Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands.4 p.
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keywords = "Resistive pressure sensor, Micro Coriolis mass flow sensor, Multiparameter measurement, Viscosity measurement",
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Groenesteijn, J, Alveringh, D, Schut, T, Wiegerink, RJ, Sparreboom, W & Lötters, JC 2017, 'Micro Coriolis mass flow sensor with integrated resistive pressure sensors' Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands, 4/10/17 - 6/10/17, pp. 16-19.

Micro Coriolis mass flow sensor with integrated resistive pressure sensors. / Groenesteijn, Jarno; Alveringh, Dennis ; Schut, Thomas; Wiegerink, Remco J.; Sparreboom, Wouter ; Lötters, Joost Conrad.

2017. 16-19 Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands.

Research output: Contribution to conferencePaperAcademicpeer-review

TY - CONF

T1 - Micro Coriolis mass flow sensor with integrated resistive pressure sensors

AU - Groenesteijn, Jarno

AU - Alveringh, Dennis

AU - Schut, Thomas

AU - Wiegerink, Remco J.

AU - Sparreboom, Wouter

AU - Lötters, Joost Conrad

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AB - We report on novel resistive pressure sensors, integrated on-chip at the inlet- and outlet-channels of a micro Coriolis mass flow sensor. The pressure sensors can be used to measure the pressure drop over the Coriolis sensor which can be used to compensate pressure-dependent behaviour that might occur and it can be used to calculate the dynamic viscosity of the fluid inside the channels.

KW - Resistive pressure sensor

KW - Micro Coriolis mass flow sensor

KW - Multiparameter measurement

KW - Viscosity measurement

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Groenesteijn J, Alveringh D, Schut T, Wiegerink RJ, Sparreboom W, Lötters JC. Micro Coriolis mass flow sensor with integrated resistive pressure sensors. 2017. Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands.