We report on novel resistive pressure sensors, integrated on-chip at the inlet- and outlet-channels of a micro Coriolis mass flow sensor. The pressure sensors can be used to measure the pressure drop over the Coriolis sensor which can be used to compensate pressure-dependent behaviour that might occur and it can be used to calculate the dynamic viscosity of the fluid inside the channels.
|Number of pages||4|
|Publication status||Published - 4 Oct 2017|
|Event||3rd Conference on MicroFluidic Handling Systems, MFHS 2017 - De Kleine Willem, Enschede, Netherlands|
Duration: 4 Oct 2017 → 6 Oct 2017
Conference number: 3
|Conference||3rd Conference on MicroFluidic Handling Systems, MFHS 2017|
|Period||4/10/17 → 6/10/17|
- Resistive pressure sensor
- Micro Coriolis mass flow sensor
- Multiparameter measurement
- Viscosity measurement
Groenesteijn, J., Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W., & Lötters, J. C. (2017). Micro Coriolis mass flow sensor with integrated resistive pressure sensors. 16-19. Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands.