Micro Coriolis mass flow sensor with integrated resistive pressure sensors

    Research output: Contribution to conferencePaper

    Abstract

    We report on novel resistive pressure sensors, integrated on-chip at the inlet- and outlet-channels of a micro Coriolis mass flow sensor. The pressure sensors can be used to measure the pressure drop over the Coriolis sensor which can be used to compensate pressure-dependent behaviour that might occur and it can be used to calculate the dynamic viscosity of the fluid inside the channels.
    Original languageEnglish
    Pages16-19
    Number of pages4
    Publication statusPublished - 4 Oct 2017
    Event3rd Conference on MicroFluidic Handling Systems, MFHS 2017 - De Kleine Willem, Enschede, Netherlands
    Duration: 4 Oct 20176 Oct 2017
    Conference number: 3
    http://mfhs2017.org

    Conference

    Conference3rd Conference on MicroFluidic Handling Systems, MFHS 2017
    Abbreviated titleMFHS
    CountryNetherlands
    CityEnschede
    Period4/10/176/10/17
    Internet address

    Keywords

    • Resistive pressure sensor
    • Micro Coriolis mass flow sensor
    • Multiparameter measurement
    • Viscosity measurement

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  • Cite this

    Groenesteijn, J., Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W., & Lötters, J. C. (2017). Micro Coriolis mass flow sensor with integrated resistive pressure sensors. 16-19. Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands.