Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching

Qihui Yu; Maarten Bonnema; Mahdieh Yariesbouei; Remco J. Wiegerink; Joost Conrad Lötters

doi:10.3390/s24247952

Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching

Qihui Yu^*, Maarten Bonnema, Mahdieh Yariesbouei, Remco J. Wiegerink, Joost Conrad Lötters

^*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

This paper introduces a Coriolis mass flow and density sensor. The sensor is made using Surface Channel Technology (SCT) but with selective wet etching to create the channels. This method forms suspended microfluidic channels with a larger cross-sectional area. Because of this larger cross-sectional area, the sensor has a much higher flow range, up to 50 g/h (for water) with a pressure drop of 1 bar, compared to the standard SCT-based Coriolis sensor, which is only 1.2 g/h. The channel has a semi-elliptical cross-sectional area, measuring 200 micrometers wide and 70 micrometers deep. The channel wall is made of a stack of thin films with a total thickness of 2.5 μm. Water, isopropyl alcohol (IPA), and nitrogen (N2) are used to test and evaluate the sensor’s mass flow and density sensing performance.

Original language	English
Article number	7952
Number of pages	16
Journal	Sensors (Basel, Switzerland)
Volume	24
Issue number	24
DOIs	https://doi.org/10.3390/s24247952
Publication status	Published - 12 Dec 2024

Keywords

Surface Channel Technology (SCT)
HNA etching
Microfluidic channel
Coriolis mass flow sensor

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10.3390/s24247952Licence: CC BY

ArticleFinal published version, 35.1 MBLicence: CC BY

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title = "Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching",

abstract = "This paper introduces a Coriolis mass flow and density sensor. The sensor is made using Surface Channel Technology (SCT) but with selective wet etching to create the channels. This method forms suspended microfluidic channels with a larger cross-sectional area. Because of this larger cross-sectional area, the sensor has a much higher flow range, up to 50 g/h (for water) with a pressure drop of 1 bar, compared to the standard SCT-based Coriolis sensor, which is only 1.2 g/h. The channel has a semi-elliptical cross-sectional area, measuring 200 micrometers wide and 70 micrometers deep. The channel wall is made of a stack of thin films with a total thickness of 2.5 μm. Water, isopropyl alcohol (IPA), and nitrogen (N2) are used to test and evaluate the sensor{\textquoteright}s mass flow and density sensing performance.",

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AU - Lötters, Joost Conrad

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N2 - This paper introduces a Coriolis mass flow and density sensor. The sensor is made using Surface Channel Technology (SCT) but with selective wet etching to create the channels. This method forms suspended microfluidic channels with a larger cross-sectional area. Because of this larger cross-sectional area, the sensor has a much higher flow range, up to 50 g/h (for water) with a pressure drop of 1 bar, compared to the standard SCT-based Coriolis sensor, which is only 1.2 g/h. The channel has a semi-elliptical cross-sectional area, measuring 200 micrometers wide and 70 micrometers deep. The channel wall is made of a stack of thin films with a total thickness of 2.5 μm. Water, isopropyl alcohol (IPA), and nitrogen (N2) are used to test and evaluate the sensor’s mass flow and density sensing performance.

AB - This paper introduces a Coriolis mass flow and density sensor. The sensor is made using Surface Channel Technology (SCT) but with selective wet etching to create the channels. This method forms suspended microfluidic channels with a larger cross-sectional area. Because of this larger cross-sectional area, the sensor has a much higher flow range, up to 50 g/h (for water) with a pressure drop of 1 bar, compared to the standard SCT-based Coriolis sensor, which is only 1.2 g/h. The channel has a semi-elliptical cross-sectional area, measuring 200 micrometers wide and 70 micrometers deep. The channel wall is made of a stack of thin films with a total thickness of 2.5 μm. Water, isopropyl alcohol (IPA), and nitrogen (N2) are used to test and evaluate the sensor’s mass flow and density sensing performance.

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Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching

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