Micro Coriolis Mass Flow Sensor with Piezoelectric Transducers for Both Actuation and Readout

Yaxiang Zeng; Remco J. Wiegerink; Joost C. Lötters

doi:10.1109/MEMS51670.2022.9699578

Micro Coriolis Mass Flow Sensor with Piezoelectric Transducers for Both Actuation and Readout

Yaxiang Zeng^*, Remco J. Wiegerink, Joost C. Lötters

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We have realized a micro Coriolis mass flow sensor with piezoelectric transducers for both actuation and readout, resulting in lower power consumption and improved robustness to shock in comparison to the current actuation and readout methods. The PZT thin film in the parallel plate piezoelectric transducers was deposited by pulsed laser deposition (PLD). This paper presents the design, fabrication process and initial characterization results with mass flow of water and nitrogen.

Original language	English
Title of host publication	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	59-62
Number of pages	4
ISBN (Electronic)	978-1-6654-0911-7
ISBN (Print)	978-1-6654-0912-4
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699578
Publication status	Published - 2022
Event	35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan Duration: 9 Jan 2022 → 13 Jan 2022 Conference number: 35 https://ieeemems2022.org/

Publication series

Name	Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher	IEEE
Number	35
Volume	2022
ISSN (Print)	1084-6999
ISSN (Electronic)	2160-1968

Conference

Conference	35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Abbreviated title	MEMS 2022
Country/Territory	Japan
City	Tokyo
Period	9/01/22 → 13/01/22
Internet address	https://ieeemems2022.org/

Keywords

Coriolis mass flow sensor
Piezoelectric transducers
PZT
2024 OA procedure

Access to Document

10.1109/MEMS51670.2022.9699578

ArticleFinal published version, 1.09 MBLicence: Taverne

Cite this

Zeng, Y., Wiegerink, R. J., & Lötters, J. C. (2022). Micro Coriolis Mass Flow Sensor with Piezoelectric Transducers for Both Actuation and Readout. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 59-62). (Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022, No. 35). IEEE. https://doi.org/10.1109/MEMS51670.2022.9699578

Zeng, Yaxiang ; Wiegerink, Remco J. ; Lötters, Joost C. / Micro Coriolis Mass Flow Sensor with Piezoelectric Transducers for Both Actuation and Readout. 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Piscataway, NJ : IEEE, 2022. pp. 59-62 (Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 35).

@inproceedings{129be455aa6845999cfffc7f2692bdf2,

title = "Micro Coriolis Mass Flow Sensor with Piezoelectric Transducers for Both Actuation and Readout",

abstract = "We have realized a micro Coriolis mass flow sensor with piezoelectric transducers for both actuation and readout, resulting in lower power consumption and improved robustness to shock in comparison to the current actuation and readout methods. The PZT thin film in the parallel plate piezoelectric transducers was deposited by pulsed laser deposition (PLD). This paper presents the design, fabrication process and initial characterization results with mass flow of water and nitrogen.",

keywords = "Coriolis mass flow sensor, Piezoelectric transducers, PZT, 2024 OA procedure",

author = "Yaxiang Zeng and Wiegerink, {Remco J.} and L{\"o}tters, {Joost C.}",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

year = "2022",

doi = "10.1109/MEMS51670.2022.9699578",

language = "English",

isbn = "978-1-6654-0912-4",

series = "Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "IEEE",

number = "35",

pages = "59--62",

booktitle = "35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022",

address = "United States",

url = "https://ieeemems2022.org/",

}

Zeng, Y , Wiegerink, RJ & Lötters, JC 2022, Micro Coriolis Mass Flow Sensor with Piezoelectric Transducers for Both Actuation and Readout. in 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS), no. 35, vol. 2022, IEEE, Piscataway, NJ, pp. 59-62, 35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japan, 9/01/22. https://doi.org/10.1109/MEMS51670.2022.9699578

Micro Coriolis Mass Flow Sensor with Piezoelectric Transducers for Both Actuation and Readout. / Zeng, Yaxiang ; Wiegerink, Remco J.; Lötters, Joost C.
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Piscataway, NJ: IEEE, 2022. p. 59-62 (Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022, No. 35).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Micro Coriolis Mass Flow Sensor with Piezoelectric Transducers for Both Actuation and Readout

AU - Zeng, Yaxiang

AU - Wiegerink, Remco J.

AU - Lötters, Joost C.

N1 - Conference code: 35

PY - 2022

Y1 - 2022

N2 - We have realized a micro Coriolis mass flow sensor with piezoelectric transducers for both actuation and readout, resulting in lower power consumption and improved robustness to shock in comparison to the current actuation and readout methods. The PZT thin film in the parallel plate piezoelectric transducers was deposited by pulsed laser deposition (PLD). This paper presents the design, fabrication process and initial characterization results with mass flow of water and nitrogen.

AB - We have realized a micro Coriolis mass flow sensor with piezoelectric transducers for both actuation and readout, resulting in lower power consumption and improved robustness to shock in comparison to the current actuation and readout methods. The PZT thin film in the parallel plate piezoelectric transducers was deposited by pulsed laser deposition (PLD). This paper presents the design, fabrication process and initial characterization results with mass flow of water and nitrogen.

KW - Coriolis mass flow sensor

KW - Piezoelectric transducers

KW - PZT

KW - 2024 OA procedure

UR - http://www.scopus.com/inward/record.url?scp=85126393125&partnerID=8YFLogxK

U2 - 10.1109/MEMS51670.2022.9699578

DO - 10.1109/MEMS51670.2022.9699578

M3 - Conference contribution

AN - SCOPUS:85126393125

SN - 978-1-6654-0912-4

T3 - Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 59

EP - 62

BT - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022

PB - IEEE

CY - Piscataway, NJ

T2 - 35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022

Y2 - 9 January 2022 through 13 January 2022

ER -

Zeng Y , Wiegerink RJ , Lötters JC. Micro Coriolis Mass Flow Sensor with Piezoelectric Transducers for Both Actuation and Readout. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Piscataway, NJ: IEEE. 2022. p. 59-62. (Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 35). doi: 10.1109/MEMS51670.2022.9699578

Micro Coriolis Mass Flow Sensor with Piezoelectric Transducers for Both Actuation and Readout

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