Micro-electrets: possibilities and problems

J.A. Voorthuyzen, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    Original languageUndefined
    Title of host publicationProc. Micromechnics Europe' 90
    Place of PublicationBerlijn
    Pages264-269
    Number of pages6
    Publication statusPublished - 26 Nov 1990

    Keywords

    • METIS-114169

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