@inbook{4d573aa52d19489c941ba83af2d92330,
title = "Micro electro mechanical systems: microelectromechanical systems",
keywords = "METIS-201119, IR-42342",
author = "Elwenspoek, {Michael Curt} and Wiegerink, {Remco J.}",
year = "2001",
language = "Undefined",
isbn = "3-211-83681-0",
series = "CISM International Centre for Mechanical Sciences",
publisher = "Springer",
number = "429",
pages = "--",
editor = "Azfal Suleman",
booktitle = "SMART structures, applications and related technologies",
address = "Germany",
}