Micro electro mechanical systems: silicon micromachining

Michael Curt Elwenspoek, R.W. Wiegerink

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Professional

Original language	Undefined
Title of host publication	SMART structures: applications and related technologies
Editors	A. Suleman
Place of Publication	Italy
Publisher	Springer
Pages	-
Number of pages	358
ISBN (Print)	3-211-83681-0
Publication status	Published - 2001

Name
Publisher	Springer Wien New York

Keywords

This output contributes to the following UN Sustainable Development Goals (SDGs)

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title = "Micro electro mechanical systems: silicon micromachining",

keywords = "IR-42344, METIS-201127",

author = "Elwenspoek, {Michael Curt} and R.W. Wiegerink",

year = "2001",

language = "Undefined",

isbn = "3-211-83681-0",

publisher = "Springer",

pages = "--",

editor = "A. Suleman",

booktitle = "SMART structures: applications and related technologies",

address = "Germany",

}