Micro electro mechanical systems: small and large, scaling

Michael Curt Elwenspoek, Remco J. Wiegerink

    Research output: Chapter in Book/Report/Conference proceedingChapterProfessional

    Original languageUndefined
    Title of host publicationSMART structures: applications and related technologies
    EditorsA. Suleman
    Place of PublicationItaly
    PublisherSpringer
    Pages-
    Number of pages358
    ISBN (Print)3-211-83681-0
    Publication statusPublished - 2001

    Publication series

    Name
    PublisherSpringer Wien New York

    Keywords

    • METIS-201120
    • IR-42343

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