Micro fluid flow controllers

J.H.J. Fluitman, Theodorus S.J. Lammerink

    Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic

    Original languageUndefined
    Title of host publicationCourse book COMMETT-MEMS
    Place of PublicationSwitzerland
    Pages62-81
    Publication statusPublished - 1993

    Keywords

    • METIS-112464

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