A simple to realise micro-liquid flow sensor with high sensitivity is presented. The sensor is based on well known thermal anemometer principles. An analytical model for the sensor behaviour applicable for gas/liquid fluids is presented. The realisation process of the sensor is described. Model and experimental results agree well. The sensor is simple to integrate with other micro-liquid handling components such as pumps, mixers, etc.
|Number of pages||6|
|Journal||Sensors and actuators. A: Physical|
|Publication status||Published - Jun 1993|
|Event||Eurosensors VI - San Sebastian, Spain|
Duration: 5 Oct 1992 → 7 Oct 1992
Conference number: 6