Micro-liquid flow sensor

Theodorus S.J. Lammerink, Niels Roelof Tas, Michael Curt Elwenspoek, J.H.J. Fluitman

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    139 Citations (Scopus)
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    Abstract

    A simple to realise micro-liquid flow sensor with high sensitivity is presented. The sensor is based on well known thermal anemometer principles. An analytical model for the sensor behaviour applicable for gas/liquid fluids is presented. The realisation process of the sensor is described. Model and experimental results agree well. The sensor is simple to integrate with other micro-liquid handling components such as pumps, mixers, etc.
    Original languageEnglish
    Pages (from-to)45-50
    Number of pages6
    JournalSensors and actuators. A: Physical
    Volume1993
    Issue number37
    DOIs
    Publication statusPublished - Jun 1993
    EventEurosensors VI - San Sebastian, Spain
    Duration: 5 Oct 19927 Oct 1992
    Conference number: 6

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