Micro-liquid flow sensor

Theodorus S.J. Lammerink; Niels Roelof Tas; Michael Curt Elwenspoek; J.H.J. Fluitman

doi:10.1016/0924-4247(93)80010-E

Micro-liquid flow sensor

Theodorus S.J. Lammerink, Niels Roelof Tas, Michael Curt Elwenspoek, J.H.J. Fluitman

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Abstract

A simple to realise micro-liquid flow sensor with high sensitivity is presented. The sensor is based on well known thermal anemometer principles. An analytical model for the sensor behaviour applicable for gas/liquid fluids is presented. The realisation process of the sensor is described. Model and experimental results agree well. The sensor is simple to integrate with other micro-liquid handling components such as pumps, mixers, etc.

Original language	English
Pages (from-to)	45-50
Number of pages	6
Journal	Sensors and actuators. A: Physical
Volume	1993
Issue number	37
DOIs	https://doi.org/10.1016/0924-4247(93)80010-E
Publication status	Published - Jun 1993
Event	Eurosensors VI - San Sebastian, Spain Duration: 5 Oct 1992 → 7 Oct 1992 Conference number: 6

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title = "Micro-liquid flow sensor",

abstract = "A simple to realise micro-liquid flow sensor with high sensitivity is presented. The sensor is based on well known thermal anemometer principles. An analytical model for the sensor behaviour applicable for gas/liquid fluids is presented. The realisation process of the sensor is described. Model and experimental results agree well. The sensor is simple to integrate with other micro-liquid handling components such as pumps, mixers, etc.",

author = "Lammerink, {Theodorus S.J.} and Tas, {Niels Roelof} and Elwenspoek, {Michael Curt} and J.H.J. Fluitman",

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AU - Tas, Niels Roelof

AU - Elwenspoek, Michael Curt

AU - Fluitman, J.H.J.

N1 - Conference code: 6

PY - 1993/6

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N2 - A simple to realise micro-liquid flow sensor with high sensitivity is presented. The sensor is based on well known thermal anemometer principles. An analytical model for the sensor behaviour applicable for gas/liquid fluids is presented. The realisation process of the sensor is described. Model and experimental results agree well. The sensor is simple to integrate with other micro-liquid handling components such as pumps, mixers, etc.

AB - A simple to realise micro-liquid flow sensor with high sensitivity is presented. The sensor is based on well known thermal anemometer principles. An analytical model for the sensor behaviour applicable for gas/liquid fluids is presented. The realisation process of the sensor is described. Model and experimental results agree well. The sensor is simple to integrate with other micro-liquid handling components such as pumps, mixers, etc.

U2 - 10.1016/0924-4247(93)80010-E

DO - 10.1016/0924-4247(93)80010-E

M3 - Article

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EP - 50

JO - Sensors and actuators. A: Physical

JF - Sensors and actuators. A: Physical

SN - 0924-4247

IS - 37

T2 - Eurosensors VI

Y2 - 5 October 1992 through 7 October 1992

ER -

Micro-liquid flow sensor

Abstract

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