Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters

M.P. Bruijn, M. Ridder, H.F.C. Hoevers, W.M. Bergmann, P.A.J. de Korte, Z. Moktadir, Remco J. Wiegerink, Johan W. Berenschot

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationProceedings of Sensor Technology 2001 Conference
EditorsMichael Curt Elwenspoek, M. Elwenspoek
Place of PublicationDordrecht
PublisherKluwer
Pages179-184
ISBN (Print)0-7923-7012-0
Publication statusPublished - 14 May 2001
EventSensor Technology Conference 2001: Sensor Technology 2001: proceedings of the Sensor Technology Conference 2001 - Enschede, the Netherlands, Enschede, Netherlands
Duration: 14 May 200115 May 2001

Publication series

Name
PublisherKluwer

Conference

ConferenceSensor Technology Conference 2001
CountryNetherlands
CityEnschede
Period14/05/0115/05/01
Other14-15 May, 2001

Keywords

  • IR-42015
  • METIS-200194

Cite this

Bruijn, M. P., Ridder, M., Hoevers, H. F. C., Bergmann, W. M., de Korte, P. A. J., Moktadir, Z., ... Berenschot, J. W. (2001). Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters. In M. C. Elwenspoek, & M. Elwenspoek (Eds.), Proceedings of Sensor Technology 2001 Conference (pp. 179-184). Dordrecht: Kluwer.
Bruijn, M.P. ; Ridder, M. ; Hoevers, H.F.C. ; Bergmann, W.M. ; de Korte, P.A.J. ; Moktadir, Z. ; Wiegerink, Remco J. ; Berenschot, Johan W. / Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters. Proceedings of Sensor Technology 2001 Conference. editor / Michael Curt Elwenspoek ; M. Elwenspoek. Dordrecht : Kluwer, 2001. pp. 179-184
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title = "Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters",
keywords = "IR-42015, METIS-200194",
author = "M.P. Bruijn and M. Ridder and H.F.C. Hoevers and W.M. Bergmann and {de Korte}, P.A.J. and Z. Moktadir and Wiegerink, {Remco J.} and Berenschot, {Johan W.}",
year = "2001",
month = "5",
day = "14",
language = "Undefined",
isbn = "0-7923-7012-0",
publisher = "Kluwer",
pages = "179--184",
editor = "Elwenspoek, {Michael Curt} and M. Elwenspoek",
booktitle = "Proceedings of Sensor Technology 2001 Conference",
address = "Netherlands",

}

Bruijn, MP, Ridder, M, Hoevers, HFC, Bergmann, WM, de Korte, PAJ, Moktadir, Z, Wiegerink, RJ & Berenschot, JW 2001, Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters. in MC Elwenspoek & M Elwenspoek (eds), Proceedings of Sensor Technology 2001 Conference. Kluwer, Dordrecht, pp. 179-184, Sensor Technology Conference 2001, Enschede, Netherlands, 14/05/01.

Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters. / Bruijn, M.P.; Ridder, M.; Hoevers, H.F.C.; Bergmann, W.M.; de Korte, P.A.J.; Moktadir, Z.; Wiegerink, Remco J.; Berenschot, Johan W.

Proceedings of Sensor Technology 2001 Conference. ed. / Michael Curt Elwenspoek; M. Elwenspoek. Dordrecht : Kluwer, 2001. p. 179-184.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters

AU - Bruijn, M.P.

AU - Ridder, M.

AU - Hoevers, H.F.C.

AU - Bergmann, W.M.

AU - de Korte, P.A.J.

AU - Moktadir, Z.

AU - Wiegerink, Remco J.

AU - Berenschot, Johan W.

PY - 2001/5/14

Y1 - 2001/5/14

KW - IR-42015

KW - METIS-200194

M3 - Conference contribution

SN - 0-7923-7012-0

SP - 179

EP - 184

BT - Proceedings of Sensor Technology 2001 Conference

A2 - Elwenspoek, Michael Curt

A2 - Elwenspoek, M.

PB - Kluwer

CY - Dordrecht

ER -

Bruijn MP, Ridder M, Hoevers HFC, Bergmann WM, de Korte PAJ, Moktadir Z et al. Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters. In Elwenspoek MC, Elwenspoek M, editors, Proceedings of Sensor Technology 2001 Conference. Dordrecht: Kluwer. 2001. p. 179-184