Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters

M.P. Bruijn, M. Ridder, H.F.C. Hoevers, W.M. Bergmann, P.A.J. de Korte, Z. Moktadir, Remco J. Wiegerink, Johan W. Berenschot

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of Sensor Technology 2001 Conference
    EditorsMichael Curt Elwenspoek, M. Elwenspoek
    Place of PublicationDordrecht
    PublisherKluwer
    Pages179-184
    ISBN (Print)0-7923-7012-0
    Publication statusPublished - 14 May 2001
    EventSensor Technology Conference 2001 - Enschede, Netherlands
    Duration: 14 May 200115 May 2001

    Publication series

    Name
    PublisherKluwer

    Conference

    ConferenceSensor Technology Conference 2001
    CountryNetherlands
    CityEnschede
    Period14/05/0115/05/01

    Keywords

    • IR-42015
    • METIS-200194

    Cite this

    Bruijn, M. P., Ridder, M., Hoevers, H. F. C., Bergmann, W. M., de Korte, P. A. J., Moktadir, Z., ... Berenschot, J. W. (2001). Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters. In M. C. Elwenspoek, & M. Elwenspoek (Eds.), Proceedings of Sensor Technology 2001 Conference (pp. 179-184). Dordrecht: Kluwer.