Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters

M.P. Bruijn; M. Ridder; H.F.C. Hoevers; W.M. Bergmann; P.A.J. de Korte; Z. Moktadir; Remco J. Wiegerink; Johan W. Berenschot

Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters

M.P. Bruijn
, M. Ridder
, H.F.C. Hoevers
, W.M. Bergmann
, P.A.J. de Korte
, Z. Moktadir
, Remco J. Wiegerink
, Johan W. Berenschot

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of Sensor Technology 2001 Conference
Editors	Michael Curt Elwenspoek, M. Elwenspoek
Place of Publication	Dordrecht
Publisher	Kluwer
Pages	179-184
ISBN (Print)	0-7923-7012-0
Publication status	Published - 14 May 2001
Event	Sensor Technology Conference 2001 - Enschede, Netherlands Duration: 14 May 2001 → 15 May 2001

Publication series

Name
Publisher	Kluwer

Conference

Conference	Sensor Technology Conference 2001
Country/Territory	Netherlands
City	Enschede
Period	14/05/01 → 15/05/01

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

IR-42015
METIS-200194

Cite this

@inproceedings{6e7d5be5124c44a0b39a65008399e921,

title = "Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters",

keywords = "IR-42015, METIS-200194",

author = "M.P. Bruijn and M. Ridder and H.F.C. Hoevers and W.M. Bergmann and \{de Korte\}, P.A.J. and Z. Moktadir and Wiegerink, \{Remco J.\} and Berenschot, \{Johan W.\}",

year = "2001",

month = may,

day = "14",

language = "Undefined",

isbn = "0-7923-7012-0",

publisher = "Kluwer",

pages = "179--184",

editor = "Elwenspoek, \{Michael Curt\} and M. Elwenspoek",

booktitle = "Proceedings of Sensor Technology 2001 Conference",

address = "Netherlands",

note = "Sensor Technology Conference 2001 ; Conference date: 14-05-2001 Through 15-05-2001",

}

Bruijn, MP, Ridder, M, Hoevers, HFC, Bergmann, WM, de Korte, PAJ, Moktadir, Z, Wiegerink, RJ & Berenschot, JW 2001, Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters. in MC Elwenspoek & M Elwenspoek (eds), Proceedings of Sensor Technology 2001 Conference. Kluwer, Dordrecht, pp. 179-184, Sensor Technology Conference 2001, Enschede, Netherlands, 14/05/01.

Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters. / Bruijn, M.P.; Ridder, M.; Hoevers, H.F.C. et al.
Proceedings of Sensor Technology 2001 Conference. ed. / Michael Curt Elwenspoek; M. Elwenspoek. Dordrecht: Kluwer, 2001. p. 179-184.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters

AU - Bruijn, M.P.

AU - Ridder, M.

AU - Hoevers, H.F.C.

AU - Bergmann, W.M.

AU - de Korte, P.A.J.

AU - Moktadir, Z.

AU - Wiegerink, Remco J.

AU - Berenschot, Johan W.

PY - 2001/5/14

Y1 - 2001/5/14

KW - IR-42015

KW - METIS-200194

M3 - Conference contribution

SN - 0-7923-7012-0

SP - 179

EP - 184

BT - Proceedings of Sensor Technology 2001 Conference

A2 - Elwenspoek, Michael Curt

A2 - Elwenspoek, M.

PB - Kluwer

CY - Dordrecht

T2 - Sensor Technology Conference 2001

Y2 - 14 May 2001 through 15 May 2001

ER -