Micro machining workstation for a diode pumped Nd:YAG high brightness laser system

R.A. Kleijhorst, H.L. Offerhaus, P. Bant

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

A Nd:YAG micro-machining workstation that allows cutting on a scale of a few microns has been developed and operated. The system incorporates a telescope viewing system that allows control during the work and a software interface to translate AutoCad files. Some examples of the performance are given. With this setup we demonstrate the possibility of machining within a few microns with a Nd:YAG laser.
Original languageEnglish
Pages (from-to)2118-2119
Number of pages2
JournalReview of scientific instruments
Volume1998
Issue number5
DOIs
Publication statusPublished - 1998

Keywords

  • IR-60500
  • METIS-128471

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