Micro machining workstation for a diode pumped Nd:YAG high brightness laser system

R.A. Kleijhorst; H.L. Offerhaus; P. Bant

doi:10.1063/1.1148908

Micro machining workstation for a diode pumped Nd:YAG high brightness laser system

R.A. Kleijhorst, H.L. Offerhaus, P. Bant

Research output: Contribution to journal › Article › Academic › peer-review

4 Citations (Scopus)

173 Downloads (Pure)

Abstract

A Nd:YAG micro-machining workstation that allows cutting on a scale of a few microns has been developed and operated. The system incorporates a telescope viewing system that allows control during the work and a software interface to translate AutoCad files. Some examples of the performance are given. With this setup we demonstrate the possibility of machining within a few microns with a Nd:YAG laser.

Original language	English
Pages (from-to)	2118-2119
Number of pages	2
Journal	Review of scientific instruments
Volume	1998
Issue number	5
DOIs	https://doi.org/10.1063/1.1148908
Publication status	Published - 1998

Keywords

IR-60500
METIS-128471

Access to Document

10.1063/1.1148908

Kleijhorst98microFinal published version, 224 KB

Cite this

@article{e56f1e1511cf4bf6b97882a0f2bdea9f,

title = "Micro machining workstation for a diode pumped Nd:YAG high brightness laser system",

abstract = "A Nd:YAG micro-machining workstation that allows cutting on a scale of a few microns has been developed and operated. The system incorporates a telescope viewing system that allows control during the work and a software interface to translate AutoCad files. Some examples of the performance are given. With this setup we demonstrate the possibility of machining within a few microns with a Nd:YAG laser.",

keywords = "IR-60500, METIS-128471",

author = "R.A. Kleijhorst and H.L. Offerhaus and P. Bant",

year = "1998",

doi = "10.1063/1.1148908",

language = "English",

volume = "1998",

pages = "2118--2119",

journal = "Review of scientific instruments",

issn = "0034-6748",

publisher = "American Institute of Physics",

number = "5",

}

TY - JOUR

T1 - Micro machining workstation for a diode pumped Nd:YAG high brightness laser system

AU - Kleijhorst, R.A.

AU - Offerhaus, H.L.

AU - Bant, P.

PY - 1998

Y1 - 1998

N2 - A Nd:YAG micro-machining workstation that allows cutting on a scale of a few microns has been developed and operated. The system incorporates a telescope viewing system that allows control during the work and a software interface to translate AutoCad files. Some examples of the performance are given. With this setup we demonstrate the possibility of machining within a few microns with a Nd:YAG laser.

AB - A Nd:YAG micro-machining workstation that allows cutting on a scale of a few microns has been developed and operated. The system incorporates a telescope viewing system that allows control during the work and a software interface to translate AutoCad files. Some examples of the performance are given. With this setup we demonstrate the possibility of machining within a few microns with a Nd:YAG laser.

KW - IR-60500

KW - METIS-128471

U2 - 10.1063/1.1148908

DO - 10.1063/1.1148908

M3 - Article

SN - 0034-6748

VL - 1998

SP - 2118

EP - 2119

JO - Review of scientific instruments

JF - Review of scientific instruments

IS - 5

ER -

Micro machining workstation for a diode pumped Nd:YAG high brightness laser system

Abstract

Keywords

Access to Document

Fingerprint

Cite this