Abstract
A Nd:YAG micro-machining workstation that allows cutting on a scale of a few microns has been developed and operated. The system incorporates a telescope viewing system that allows control during the work and a software interface to translate AutoCad files. Some examples of the performance are given. With this setup we demonstrate the possibility of machining within a few microns with a Nd:YAG laser.
| Original language | English |
|---|---|
| Pages (from-to) | 2118-2119 |
| Number of pages | 2 |
| Journal | Review of scientific instruments |
| Volume | 1998 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 1998 |
Keywords
- IR-60500
- METIS-128471